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Graphite boat

A graphite boat and graphite technology, which is applied in the field of solar cell processing, can solve the problems affecting the production efficiency of silicon wafer coating and the generation of fragments, so as to increase the insertion space, reduce the fragmentation rate, and reduce the processing cost.

Inactive Publication Date: 2012-02-15
WUXI GREENWAVE NEW ENERGY EQUIP
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, operators in the market have debris when inserting and removing si

Method used

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  • Graphite boat
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Embodiment Construction

[0009] The present invention will be further described below in conjunction with specific drawings and embodiments.

[0010] Such as Figure 1~Figure 2 Shown: the present invention includes graphite nut 1, graphite rod 2, first fixed process point 3, second fixed process point 4, third fixed process point 5, first graphite boat sheet 6, graphite block 7, second graphite boat Sheet 8, ceramic tube 9, first graphite rod installation hole 10, fixed sheet 11, first fixed sheet installation hole 12, second fixed sheet installation hole 13, silicon chip 14, boat body 15, third graphite boat sheet 16 And the fourth graphite boat sheet 17.

[0011] Such as figure 1 with figure 2 Shown: described graphite boat comprises the first graphite boat sheet 6, the second graphite boat sheet 8, the 3rd graphite boat sheet 16 and the 4th graphite boat sheet 17 of some interlaced distributions successively, promptly the second graphite boat sheet 8 is positioned at the first Between a graphi...

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Abstract

The invention relates to a graphite boat which comprises a first graphite boat piece, a second graphite boat piece, a third graphite boat piece and a fourth graphite boat piece which are distributed in a staggered manner, wherein the first graphite boat piece, second graphite boat piece, third graphite boat piece and fourth graphite boat piece are connected in series with a graphite nut through a graphite rod and then connected firmly; the first graphite boat piece, second graphite boat piece, third graphite boat piece and fourth graphite boat piece are isolated from one another through ceramic pipes; graphite blocks are sleeved on the graphite bars at the end parts of the first graphite boat piece, second graphite boat piece, third graphite boat piece and fourth graphite boat piece; the length of the ceramic pipe is 10.98-11.02 mm, the outer diameter is 9.95-10.05 mm, and the inner diameter is 6.1-6.3 mm; the diameter of the graphite bar is 5.9-6 mm; the first graphite boat piece, second graphite boat piece, third graphite boat piece and fourth graphite boat piece are provided with a graphite bar mounting hole respectively; and the aperture of the graphite rod mounting hole is 6.1-6.5 mm. Through the invention, the breaking rate of a silicon wafer is reduced, the film coating efficiency of the silicon wafer is improved, the processing cost is lowered, and the graphite boat has good adaptability and is safe and reliable.

Description

technical field [0001] The invention relates to a solar battery sheet processing equipment, in particular to a graphite boat, in particular to equipment for reducing the rate of graphite boat inserting silicon chip fragments, and belongs to the technical field of solar battery sheet processing. Background technique [0002] As the demand for solar cells continues to grow, cell manufacturers want to improve product quality without adding equipment, power, and gas, while also reducing costs. Graphite boats are usually formed by combining components such as graphite boat sheets and graphite blocks. At present, operators in the market have debris when inserting and removing silicon wafers, which affects the production efficiency of silicon wafer coating. Contents of the invention [0003] The purpose of the present invention is to overcome the deficiencies in the prior art, to provide a graphite boat, which is simple and compact in structure, easy to install and use, reduces ...

Claims

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Application Information

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IPC IPC(8): H01L21/673H01L31/18
CPCY02P70/50
Inventor 尤耀明代宁李文虎
Owner WUXI GREENWAVE NEW ENERGY EQUIP