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Miniature electric field sensor with special-shaped electrodes

An electric field sensor, sensor technology, applied in the direction of electrostatic field measurement, etc., can solve the problems of low charge induction efficiency, difficult sensor sensitivity, etc.

Active Publication Date: 2012-05-09
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, affected by the edge effect of the shielding electrode, there are fewer electric field lines terminated on the electric field sensing electrode of the sensor, and the charge induction efficiency is low, which makes it difficult to further improve the sensor sensitivity

Method used

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  • Miniature electric field sensor with special-shaped electrodes
  • Miniature electric field sensor with special-shaped electrodes
  • Miniature electric field sensor with special-shaped electrodes

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Embodiment Construction

[0038] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0039] figure 1 It is a structural schematic diagram of the special-shaped electrode miniature electric field sensor according to the present invention, the sensor mainly includes a sensitive structure of the sensor, a drive circuit unit 6 and a signal detection circuit unit 7, etc., wherein the sensitive structure of the sensor mainly includes a substrate 1, Exciting unit 2, shielding electrode 3, electric field induction electrode 4, multiple anchor points 5 and other parts. The excitation unit 2 is fixed on the left and right sides of the substrate 1, wherein the excitation unit 2 includes excitation electrodes and support beams; the shielding electrode 3 is fixed on the excitation units 2 on the left and right sides through the middle beam 32; the electric field induction electrode 4 is composed of an anchor The crossbeam 42 connected at point 5 is fixed on the ...

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Abstract

The invention discloses a miniature electric field sensor with special-shaped electrodes, which relates to the sensor technology. A sensor sensitive structure comprises a substrate, an exciting unit, a shielding electrode, an electric field induction electrode, an anchor point and other parts. The exciting unit comprises an exciting electrode and a support beam, which are symmetrically distributed at two sides of the sensor sensitive structure; and the shielding electrode and the electric field induction electrode are arranged in staggered form, and are distributed at a middle position region of the sensor sensitive structure. The exiting unit, the shielding electrode, the electric field induction electrode, the anchor point and the like are located in the same structural layer. The miniature electric field sensor provided by the invention comprises the special-shaped electric field induction electrode and shielding electrode, thus, charge changes of the electric field induction electrode in the sensor within unit time is increased, and the sensitivity of the miniature electric field sensor is improved.

Description

technical field [0001] The invention relates to the technical field of electric field sensors, in particular to a miniature electric field sensor with special-shaped electrodes. Background technique [0002] Electric field sensor is a device for measuring electric field strength and potential. It is widely used in many fields such as national defense, aerospace, weather detection, electric power, earthquake prediction, scientific research and industrial production, and plays a very important role. For example, in the field of meteorology, with the help of electric field sensors to monitor changes in the atmospheric electric field on the ground and in the air, accurate meteorological information can be obtained, thereby providing security for the launch of missiles, satellites and other aircraft; in the field of industrial production, the use of electrostatic field sensors to monitor The potential distribution and electric field distribution in the industrial environment help...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R29/12
Inventor 夏善红杨鹏飞彭春荣
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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