Miniature electric field sensor with special-shaped electrodes

An electric field sensor, sensor technology, applied in the direction of electrostatic field measurement, etc., can solve the problems of low charge induction efficiency, difficult sensor sensitivity, etc.
CN102445604AActive Publication Date: 2012-05-09INST OF ELECTRONICS CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
INST OF ELECTRONICS CHINESE ACAD OF SCI
Publication Date
2012-05-09

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Abstract

The invention discloses a miniature electric field sensor with special-shaped electrodes, which relates to the sensor technology. A sensor sensitive structure comprises a substrate, an exciting unit, a shielding electrode, an electric field induction electrode, an anchor point and other parts. The exciting unit comprises an exciting electrode and a support beam, which are symmetrically distributed at two sides of the sensor sensitive structure; and the shielding electrode and the electric field induction electrode are arranged in staggered form, and are distributed at a middle position region of the sensor sensitive structure. The exiting unit, the shielding electrode, the electric field induction electrode, the anchor point and the like are located in the same structural layer. The miniature electric field sensor provided by the invention comprises the special-shaped electric field induction electrode and shielding electrode, thus, charge changes of the electric field induction electrode in the sensor within unit time is increased, and the sensitivity of the miniature electric field sensor is improved.
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Description

technical field

[0001] The invention relates to the technical field of electric field sensors, in particular to a miniature electric field sensor with special-shaped electrodes. Background technique

[0002] Electric field sensor is a device for measuring electric field strength and potential. It is widely used in many fields such as national defense, aerospace, weather detection, electric power, earthquake prediction, scientific research and industrial production, and plays a very important role. For example, in the field of meteorology, with the help of electric field sensors to monitor changes in the atmospheric electric field on the ground and in the air, accurate meteorological information can be obtained, thereby providing security for the launch of missiles, satellites and other aircraft; in the field of industrial production, the use of electrostatic field sensors to monitor The potential distribution and electric field distribution in the industrial environment help...

Claims

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