Vacuum degree measuring system and method for local position in vacuum container
A technology of vacuum container and measurement system, which is applied to the measurement of the vacuum degree of the local position inside the vacuum container, and the vacuum gauge to measure the vacuum degree inside the vacuum container, which can solve the problems of breakdown discharge, damage to the vacuum gauge circuit, and inability to dissipate heat. , to achieve the effect of small scale, easy implementation and simple structure
Inactive Publication Date: 2012-05-16
BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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Problems solved by technology
However, if the required measurement range covers low vacuum measurement and high vacuum measurement, the composite vacuum gauge that needs to be used has related working circuits, and it works under vacuum. On the one hand, it may not be able to dissipate heat due to the lack of air; When it is low, the product of electrode distance and vacuum degree will have a certain relationship with the gas breakdown voltage. When it reaches the lowest point, it may cause breakdown discharge under low pressure and damage the circuit inside the vacuum gauge.
Therefore, how to measure the degree of vacuum at a certain position inside the vacuum container has not yet been resolved.
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[0010] The present invention will be described in detail below with reference to the accompanying drawings, but the accompanying drawings are only for illustrative purposes and are not intended to limit the protection scope of the present invention, which is defined by the appended claims.
[0011] figure 1 It is a schematic diagram of the vacuum degree measuring system of the partial position in the vacuum container of the present invention. Wherein, the vacuum degree measurement system of the local position in the vacuum container of the present invention includes a bellows 1 whose one end is arranged on the vacuum container 2, the bellows and the vacuum container are vacuum-sealed by a sealing flange 5, and the vacuum gauge 4 is arranged on the bellows 2. The other end of the tube 1 is sealed according to the specific interface of the vacuum gauge. The lead 6 of the vacuum gauge is led out through the bellows 1 to the outside of the vacuum container 2, and one end of the be...
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The invention discloses a vacuum degree measuring system and a vacuum degree measuring method for a local position in a vacuum container. The system comprises a corrugated pipe of which one end is arranged on the vacuum container, wherein the corrugated pipe and the vacuum container are sealed in vacuum through a sealing flange; a vacuum gauge is arranged at the other end of the corrugated pipe; sealing is performed according to a specific interface of the vacuum gauge; a lead of the vacuum gauge is led out of the vacuum container through the corrugated pipe; and the vacuum degree of a position of which the vacuum degree is to be measured is measured by moving one end of the corrugated pipe where the vacuum gauge is arranged to the position through the vacuum gauge. In the invention, the vacuum gauge is placed into the vacuum container for measuring, so that the vacuum degree of the local position can be measured. Moreover, the measuring system has a simple structure and a small scale, does not require modification on the conventional vacuum gauge, and is easy to realize.
Description
technical field [0001] The invention belongs to the field of vacuum testing, and in particular relates to a method for measuring the vacuum degree of a partial position inside a vacuum container, particularly a method for measuring the vacuum degree inside a vacuum container by using a common vacuum gauge. Background technique [0002] Usually, the measurement of the vacuum degree in the vacuum container is performed by using a vacuum gauge. The vacuum gauge is installed on the wall of the vacuum container and can only reflect the vacuum degree near the installation location. For the vacuum measurement of certain positions inside the vacuum container, the vacuum gauge needs to be placed in this position to complete the work. However, if the required measurement range covers low vacuum measurement and high vacuum measurement, the composite vacuum gauge that needs to be used has a related working circuit. Working under vacuum, on the one hand, it may not be able to dissipate h...
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IPC IPC(8): G01L21/00G01L7/06
Inventor 徐焱林刘业楠王志浩聂翔宇易忠唐小金张超邓佳欣
Owner BEIJING INST OF SPACECRAFT ENVIRONMENT ENG