Planarized magnetic recording disk with pre-patterned surface features and secure adhesion of planarizing fill material and method for planarizing the disk

A magnetic recording, flat technology, applied in the direction of pattern record carrier, magnetic recording layer, different record carrier forms, etc., can solve the problem of non-magnetic filling material peeling off and so on

Inactive Publication Date: 2012-05-23
HITACHI GLOBAL STORAGE TECH NETHERLANDS BV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, non-magnetic fill materials may delaminate during CMP

Method used

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  • Planarized magnetic recording disk with pre-patterned surface features and secure adhesion of planarizing fill material and method for planarizing the disk
  • Planarized magnetic recording disk with pre-patterned surface features and secure adhesion of planarizing fill material and method for planarizing the disk
  • Planarized magnetic recording disk with pre-patterned surface features and secure adhesion of planarizing fill material and method for planarizing the disk

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Embodiment Construction

[0017] figure 1 A disk drive with a rotary actuator 2 and a rigid magnetic recording disk 10 is shown, the magnetic recording disk 10 having pre-patterned surface features formed on the surface 11. The surface features include at least pre-patterned servo blocks in angularly spaced servo sectors 18. The disk 10 rotates in the direction 102 about the central axis 100. The surface 11 has an endless data band 12 which is defined by an inner diameter (ID) 14 and an outer diameter (OD) 16. The part of the data zone between the servo sectors 18 is used to store user data and contains circular data tracks. Each data track is generally divided into multiple physical data sectors. The disc 10 may be a DTM disc. In this case, the circular data tracks are discrete radially spaced high tracks separated by a recessed guard band. Except for the servo blocks in the servo sector 18, the high tracks The road and recessed guard band form the surface features. The disk 10 may also be a BPM dis...

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Abstract

A magnetic recording disk has surface features of elevated lands and recessed grooves, and a planarized upper surface. A chemical-mechanical-polishing (CMP) stop layer is deposited over the lands and into the recesses. An adhesion film, like silicon, is deposited over the CMP stop layer, and fill material containing a silicon oxide (SiOx) is deposited over and in contact with the adhesion film. The adhesion film improves the adhesion of the SiOx fill material and prevents delamination during a subsequent two-step CMP planarizing process.

Description

Technical field [0001] The present invention generally relates to magnetic recording disks with pre-patterned surface features of raised lands and recessed grooves or grooves, and more particularly, to such disks with flattened surfaces. Background technique [0002] Conventional magnetic recording hard disk drives use horizontal recording or vertical recording. In horizontal recording, the magnetized area that defines the magnetic recording data bit is oriented in the plane of the recording layer on the hard disk; in perpendicular recording, the magnetized area is oriented perpendicular to the plane of the recording layer. A conventional disc is a "continuous medium (CM)" disc, in which the recording layer is a continuous layer of magnetic material. When a write head writes on the magnetic material, the continuous layer of magnetic material becomes formed into concentric data containing magnetic recording data bits Tao. The recording layer also includes a pre-recorded pattern ...

Claims

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Application Information

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IPC IPC(8): G11B5/82G11B5/84G11B5/72
CPCG11B5/743G11B5/855G11B5/82G11B5/746
Inventor V.P.S.拉瓦特K.A.鲁宾
Owner HITACHI GLOBAL STORAGE TECH NETHERLANDS BV
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