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Magnetic biosensor and preparation method thereof

A biosensor and magnetic technology, applied in biological testing, devices applying electro-magnetic effects, manufacturing/processing of electromagnetic devices, etc., can solve problems such as short circuit and preparation failure

Inactive Publication Date: 2012-06-06
北京德锐磁星科技有限公司
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Re-precipitation leads to the formation of conductive channels at the boundaries of thin film layers, forming short circuits and ultimately leading to fabrication failure

Method used

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  • Magnetic biosensor and preparation method thereof
  • Magnetic biosensor and preparation method thereof
  • Magnetic biosensor and preparation method thereof

Examples

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Embodiment Construction

[0016] Several selected examples of the preparation method of the magnetic biosensor involved in the present invention will be described in detail below with reference to the accompanying drawings. Those skilled in the art will understand that the following introduction is for the purpose of illustration and should not be construed as limiting the present invention. Other changes within the scope of the present invention are also included in the present invention.

[0017] In order to make full use of the existing semiconductor preparation process to prepare magnetic biosensors (and other non-traditional materials. Or other electronic devices), while avoiding the re-precipitation of materials at the film boundary and the diffusion of materials, the present invention utilizes a groove structure to prepare At least a portion of the thin film layers, especially those that are significantly affected by redeposition or material diffusion, or those that directly lead to fabrication ...

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Abstract

The invention discloses a magnetic biosensor and a preparation method thereof. The method comprises the following steps: generating a groove layer on a substrate, and generating a groove corresponding to the magnetic biosensor in the groove layer. At least part of the magnetic biosensor is generated in the groove.

Description

technical field [0001] The application of the present invention generally relates to magnetic biosensors and magnetic biosensor arrays, and specifically relates to a preparation method of magnetic biosensors and magnetic biosensor arrays. Background technique [0002] Magnetic biosensors use nano-magnetic particles to identify biomolecules and measure the micro-magnetic field of nano-magnetic particles to detect biological samples into biomolecules, etc. Most of the current magnetic biosensors are based on micro-magnetic field measurement technology, often using sensitive giant magnetoresistance structures, such as spin valve (spin valve, SV), magnetic tunnel junction (magnetic tunnel junction, MTJ) and some other magnetic multilayer film stacks. structure. figure 1 Schematically shows the structure of a magnetic biosensor. Such as figure 1 As shown, the magnetic biosensor 100 includes a substrate 116 and a sensing layer 118 . The substrate contains circuitry that can be...

Claims

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Application Information

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IPC IPC(8): H01L43/12H01L43/00G01N27/72G01N33/58
Inventor 张彪白虹
Owner 北京德锐磁星科技有限公司
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