Switch linear phase shifter based on micro electro mechanical system (MEMS) capacitance and inductance phase shifting unit

Abstract

The invention relates to a switch linear phase shifter based on a micro electro mechanical system (MEMS) capacitance and inductance phase shifting unit, which comprises MEMS switches, a T-shaped node, a reference phase shifting coplanar waveguide transmission line, an MEMS capacitance and inductance phase shifting transmission line, a transmission line right-angled corner, an MEMS switch electrode, a lead wire, an isolating resistor and a medium substrate. The reference phase shifting coplanar waveguide transmission line and the phase shifting transmission line embedded into an MEMS capacitor and inductor form two transmission paths of the switch linear phase shifter, the MEMS switches are arranged on the T-shaped node and used for strobing the two transmission paths, and the transmission line right-angled corner is used for connecting two sections of transmission lines perpendicular to each other. The switch linear phase shifter based on the MEMS capacitance and inductance phase shifting unit has the advantages that a phase delay unit formed by the MEMS capacitor and inductor effectively reduces integral size of the phase shifter, and a small-sized multi-digit switch linear phase shifter based on the MEMS capacitance and inductance phase shifting unit can be obtained by connecting a plurality of switch linear phase shifters based on the MEMS capacitance and inductance phase shifting unit in cascading mode.

Description

technical field [0001] The invention belongs to the field of radio frequency micro-electromechanical systems (RF MEMS), and in particular relates to a miniaturized switch linear phase shifter, in particular to a switch linear phase shifter based on a MEMS capacitive inductance phase shifter unit. Background technique [0002] The phase shifter is the most important subsystem in the phase control array, which can adjust the phase of the wave, and is widely used in satellite communication, radar, missile control and other fields. MEMS phase shifters can generally be divided into distributed phase shifters, reflective phase shifters and switch linear phase shifters. Distributed phase shifter, also known as DMTL (Distributed Microelectro-mechanical System Transmission Line), is based on a transmission line periodically loaded with discrete variable capacitance. By increasing the distributed capacitance on the transmission line, the phase velocity is reduced and a phase shift is ...

AI Technical Summary

Problems solved by technology

The three-position switch linear phase shifter can realize 2 3 However, due to the uneven length of different phase shifts, the length of the unit with a large phase shift value is longer, resulting in a waste of chip area, and the implementation of microstrip lines requires drilling holes on the substrate, and the process is more complicated.

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