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Thin film transistor array substrate and manufacturing method thereof

A technology of thin film transistors and array substrates, applied in the field of thin film transistor array substrates and its production, can solve the problems of complicated process, difficult production and high production cost, and increase the difficulty of production of liquid crystal displays, so as to simplify the process and reduce the difficulty of production , the effect of reducing the production cost

Active Publication Date: 2014-02-26
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] An object of the present invention is to provide a method for manufacturing a thin film transistor array substrate, so as to solve the problem that the process of forming a thin film transistor array substrate for an FFS type liquid crystal display through multiple masks in the prior art is relatively complicated, and the manufacturing difficulty and cost are relatively high. , a technical problem that increases the production difficulty of LCD

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  • Thin film transistor array substrate and manufacturing method thereof
  • Thin film transistor array substrate and manufacturing method thereof
  • Thin film transistor array substrate and manufacturing method thereof

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Embodiment Construction

[0030] The following descriptions of the various embodiments refer to the accompanying drawings to illustrate specific embodiments in which the present invention can be practiced. The directional terms mentioned in the present invention, such as "up", "down", "front", "back", "left", "right", "inside", "outside", "side", etc., are for reference only The orientation of the attached schema. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention.

[0031] In the figures, structurally similar units are denoted by the same reference numerals.

[0032] Please refer to figure 1 , which shows a schematic cross-sectional view of a display panel and a backlight module according to an embodiment of the present invention. The manufacturing method of the thin film transistor (TFT) array substrate of this embodiment can be applied in the manufacturing process of the display panel 10 (such as a liquid cryst...

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Abstract

A thin-film transistor array substrate (11) and a manufacturing method therefor. A transparent conductive layer (120) and a first metal layer (130) are deposited on a substrate (110); a multi-stage adjustment mask is utilized to form a gate electrode (140) and a common electrode (121). A gate insulation layer (150), a semiconductor layer (160), and a second metal layer (170) are deposited on the substrate (110); a second multi-stage mask is utilized to form a pixel electrode (180), a source electrode (171), and a drain electrode (172). Thus, the manufacturing process is simplified.

Description

【Technical field】 [0001] The invention relates to the technical field of liquid crystal production, in particular to a thin film transistor array substrate and a manufacturing method thereof. 【Background technique】 [0002] With the continuous promotion and popularization of liquid crystal displays, high requirements are put forward for the display performance of liquid crystal displays. [0003] The Fringe Field Switching (FFS) technology is increasingly used in the liquid crystal display field due to its high penetration and large viewing angle. [0004] In the thin film transistor (Thin Film Transistor, TFT) array substrate manufacturing process of the FFS liquid crystal display, it is necessary to use multiple photomasks for the photolithography process (Photo-lithography). However, the photomasks are quite expensive, and the more the number of photomasks, The cost required for the thin film transistor manufacturing process is higher, and the manufacturing process time ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/77H01L27/12G02F1/1362G02F1/1368
CPCG02F1/1368H01L21/77H01L27/1288H01L29/78633G02F1/1343G02F1/134372
Inventor 贾沛杨流洋
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD