Sealing method for degassing tube

A technology for degassing tubes and clamping flats, which is applied in the field of semiconductor manufacturing, and can solve problems such as gaps, inability to maintain the vacuum degree of the vacuum package, and air leakage, and achieve the effects of simple process, guaranteed vacuum degree, and convenient operation

Active Publication Date: 2014-03-05
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a degassing tube sealing method to solve the technical problems that the vacuum degree in the vacuum jacket cannot be maintained and that gaps and air leakage occur during the subsequent jacket cooling, storage and transportation.

Method used

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  • Sealing method for degassing tube
  • Sealing method for degassing tube
  • Sealing method for degassing tube

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Embodiment Construction

[0033] The invention provides a method for sealing a degassing tube, such as figure 1 , to solve the technical problems that the vacuum degree in the vacuum bag cannot be maintained and the gaps and air leakage appear in the subsequent bag cooling, storage and transportation process, and has the advantages of simple process, convenient operation and good sealing effect. The degassing tube sealing method comprises:

[0034] Step S11, providing a degassing tube, one end of the degassing tube is connected to a vacuum device, and the other end is connected to a vacuum bag.

[0035] Step S12, disconnect the degassing tube from the vacuum equipment.

[0036] Step S13, performing heat treatment on the vacuum equipment end of the degassing tube, the heat treatment temperature being 900°C-1100°C.

[0037] Step S14 , performing multiple clamping treatments on the vacuum equipment end after the heat treatment to form multiple clamping places.

[0038] Step S15 , performing pinch-off p...

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Abstract

Disclosed is a sealing method for a degassing tube. A first end of the degassing tube is connected with vacuum equipment, a second end of the degassing tube is connected with a vacuum sheath, and the sealing method is executed after vacuumizing treatment is performed in a heating environment. The sealing method includes the steps: separating the first end of the degassing tube from the vacuum equipment; performing heat treatment for the first end of the degassing tube at the temperature of 900-1100 DEG C; pinching the first end after heat treatment for multiple times to form a plurality of pinched positions; and pinching off the pinched position farthest away from the vacuum sheath. The sealing method for the degassing tube can be used for solving the technical problems that vacuum degree in the vacuum sheath cannot be maintained, and gaps and gas leakage occur in subsequent sheath cooling, storage and transportation process, and has the advantages of simple process, convenience in operation and fine sealing effect.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a method for sealing a degassing tube. Background technique [0002] Large scale integrated circuits use sputtering targets for vacuum sputtering. When the sputtering target is made by powder metallurgy, the powder is prone to oxidation during isostatic pressing, so the powder needs to be put into the package, after degassing treatment, then the package is sealed, and then put into the isostatic pressing furnace Densification is carried out in the middle; when the sputtering target and the back plate are diffused and welded, it is also necessary to make a corresponding sheath to prevent oxidation, after degassing treatment, then seal the sheath, and then put it into an isostatic furnace for welding . [0003] The above-mentioned degassing treatment is to put powder or metal block (the metal block includes the sputtering target and the back plate to be welded) into a w...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23P15/00
Inventor 姚力军相原俊夫大岩一彦潘杰王学泽袁海军
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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