Low current fuse
A technology for fuses and electrodes used in the manufacture of these fuses, land grid arrays and surface mount microcurrent fuses
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[0078] refer to figure 1 , the following preferred embodiments are intended to provide a low current fuse 100 rated to blow if exposed to a maximum current in excess of between 0.1 and 0.5 amps.
[0079] The required dimensions are precisely reproducible and the fuse needs to have a high electromigration resistance. Such precise low-current fuses can be obtained by depositing fuse element 104 comprising nickel or copper traces 3 to 20 μm (micrometers) wide, with a predetermined thickness in the range of 0.2 to 2 microns, and preferably There is an integral pad 106 .
[0080] A thin layer of tantalum 103 is preferably deposited first to obtain good adhesion and prevent interaction between the substrate 102 and the nickel fuse element 104 .
[0081] Glass is selected as the substrate 102 . It should be noted that various glasses, ceramics or glass-ceramics may be used.
[0082] The thin layer 103 of tantalum, which is typically several hundred Angstroms thick, can be deposit...
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