Y-axis tilting device of specimen microscope stage for piezoelectric ceramics driven transmission electron microscope
A piezoelectric ceramic drive, electron microscope technology, applied to circuits, discharge tubes, electrical components, etc., can solve the problems of large volume occupied by the overall rotating device, easy damage to the gemstone rotating shaft, and occupying space in the rod, and achieves compact structure. Space-saving, versatile effect
Active Publication Date: 2015-05-20
安徽泽攸科技有限公司
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Problems solved by technology
The technology is mature, but there are disadvantages such as complex mechanical structure, and the jewel shaft of the sample carrier is easily damaged.
Another problem lies in this Y-tilt solution, the overall rotation device occupies a large volume, occupying almost the entire space inside the sample rod, and it is almost impossible to install additional measuring devices on the sample rod
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[0020] The present invention will now be described more fully with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
[0021] For ease of description, spatially relative terms such as "upper," "lower," "left," and "right" may be used herein to describe the relationship of one element or feature relative to another element or feature shown in the figures. It will be understood that the spatial terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described ...
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The invention discloses a Y-axis tilting device of a specimen microscope stage for a piezoelectric ceramics driven transmission electron microscope, which comprises a specimen holder body and a specimen microscope stage, wherein a left and a right piezoelectric ceramics are fixedly arranged at the front end of the specimen holder body, both the front ends of the two piezoelectric ceramics are respectively provided with an electric conduction smooth hard body, the left and right two sides of an installation part on the specimen microscope stage are respectively provided with an elastic metal wire, and the specimen microscope stage is installed on the electric conduction smooth hard body through the surrounding and clamping of the elastic metal wires; and through loading sawtooth voltage onto the piezoelectric ceramics, the piezoelectric ceramics generate up and down vibration within asymmetric time periods, so the specimen microscope stage is enabled to rotate by taking a central line of the two electric conduction smooth hard bodies as a rotating axis. The device has simple mechanical design and a compact structure, the tilting degree is accurately controlled, a large tilting angle is obtained through a plurality of steps of small angles of tilting, the tilting degree of each step is determined by the deflection of the piezoelectric ceramics, so the device is accurately controlled. The device can be used on the specimen holder of the conventional transmission electron microscope, and has strong universality.
Description
technical field [0001] The invention relates to the field of transmission electron microscope accessories, in particular to a Y-axis tilting device for a sample carrier used in a transmission electron microscope driven by piezoelectric ceramics. Background technique [0002] In transmission electron microscopy, it is sometimes necessary to adjust the direction of the sample relative to the incident electron beam to obtain better observation results. The rotation along the axis of the sample rod is called X-axis rotation, and the rotation perpendicular to the rod axis and the direction of electron beam incidence Called Y-axis rotation. Generally, the X-axis rotation is realized by the goniometer of the transmission electron microscope, which has nothing to do with the sample rod, while the Y-axis rotation needs to be realized by rotating the sample stage on the sample rod. The traditional Y-axis rotation device is to insert the sample stage into the front end of the sample r...
Claims
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IPC IPC(8): H01J37/20G01N23/22
Inventor 许智白雪冬
Owner 安徽泽攸科技有限公司