Fluidized bed reactor used for producing polysilicon and preparation method of polysilicon

Abstract

The invention provides a fluidized bed reactor used for producing polysilicon and a preparation method of polysilicon. The fluidized bed reactor comprises a fluidized bed reactor shell, wherein the top of the fluidized bed reactor shell is provided with a seed silicon feed port and a tail gas outlet, the bottom of the fluidized bed reactor shell is provided with a product particle silicon discharge port, the particle silicon discharge port is connected with the bottom end of a gas distributor, a lower chamber formed by the gas distributor and the fluidized bed reactor is a process gas inlet buffer chamber, the side surface of the process gas inlet buffer chamber is provided with a process gas inlet, a built-in heater is arranged on the gas distributor, a lining material is arranged on an inner ring of the built-in heater, and the lining material consists of a lining material main body layer and a lining material settled layer. By utilizing the fluidized bed reactor for producing polysilicon, the continuity of polysilicon production can be realized, and the production cost of polysilicon can be reduced.

Description

technical field [0001] The invention relates to a polysilicon production equipment and method, in particular to a fluidized bed reactor and a method for preparing high-purity granular polysilicon by utilizing silane decomposition. Background technique [0002] With the continuous improvement of polysilicon production technology, the production cost of polysilicon currently used in the solar industry has been greatly reduced. The current mainstream method of producing polysilicon is the Siemens method, and the core reactions closely related to the production of polysilicon are as follows: [0003] SiHCl3+H2——Si+3HCl [0004] 2SiHCl3——Si+SiCl4+2HCl [0005] It has been quite a long time since the development of Siemens method to produce polysilicon, and the closed loop of the entire production process has been realized, pollution has been basically eliminated, and the energy consumption per unit output of polysilicon has also been reduced to 100 kWh / kg.si. However, judging ...

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Problems solved by technology

[0014] The patent document with the application number 200580038841.0 gives a new process direction, but does not give a clear explanation on the specific implementation method, and the corresponding CVD reactor form does not give a clear definition

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