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Negative stiffness apparatus and vibration damping system applying same

A vibration-damping system and negative stiffness technology, applied in non-rotational vibration suppression and other directions, can solve the problems of reducing the resonance frequency of the vibration-damping system, occupying a large space, and increasing the volume of the cylinder, so as to reduce vibration and reduce stiffness.

Inactive Publication Date: 2012-10-17
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology

However, there are also problems with the damping system. Since the volume of the cylinder is directly and negatively proportional to the square of the resonance frequency of the shock absorber, increasing the volume of the cylinder cannot obviously reduce the resonance frequency of the damping system.
If the resonance frequency is reduced by half, the volume of the cylinder will increase by four times, taking up too much space

Method used

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  • Negative stiffness apparatus and vibration damping system applying same
  • Negative stiffness apparatus and vibration damping system applying same
  • Negative stiffness apparatus and vibration damping system applying same

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Embodiment Construction

[0032] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.

[0033] figure 1 Shown is a negative stiffness device according to a preferred embodiment of the present invention. figure 2 shown as figure 1 The structural force diagram of the negative stiffness device in .

[0034] Please refer to figure 1 and figure 2 .

[0035] The ability of a spring to resist deformation is defined as stiffness. If the spring produces a Δ displacement and is balanced under the action of an external force F, it is expressed by an expression: F=kΔ, k is the stiffness. Generally, k is a positive value, so this stiffness is also called positive stiffness.

[0036] If the spring produces a (-Δ) displacement, it is balanced under the action of an external force F, expressed in an expression: F=k(-Δ), that is, F=(-k)Δ, and (-k) is the stiffness. Obviously, the stiffness (...

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Abstract

The invention provides a negative stiffness apparatus which comprises a first magnet and a second magnet. The first magnet is fixed on a foundation and comprises a first section and a second section with opposite magnetic properties, wherein a space is formed between the first section and the second section. The second magnet is arranged in the space and comprises a third section and a fourth section with opposite magnetic properties, wherein the third section is arranged adjacent to one side of the first section while the fourth section is arranged adjacent to one side of the second section and the third section and the fourth section have magnetic properties opposite to the first section and the second section respectively. The second magnet is not contacted with the fist magnet. The invention also discloses a vibration damping system applying the negative stiffness apparatus. The negative stiffness apparatus is capable of lowering the stiffness of the vibration damping system to the maximum and further reducing the vibration transmitted by a foundation platform to a load.

Description

technical field [0001] The present invention relates to a vibration damping device, and in particular to a vibration damping system including a negative stiffness device. Background technique [0002] Vibration reduction platforms, such as semiconductor exposure equipment, precision testing equipment, etc., include bases and machine loads in their components. The base is fixed to the ground or a platform. The machine load has a mechanical frame that supports the vibration-sensitive parts of the machine, such as the workpiece table, mask table, exposure objective, and some measurement equipment in a lithography machine. Between the base and the machine load is a set of vibration-damping support equipment. Here, the damping platform has two main functions. One is for support and the other is for damping. [0003] There are many factors that affect the vibration of the base, mainly including the introduction of foundation vibration, the external reaction force and moment on...

Claims

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Application Information

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IPC IPC(8): F16F15/02F16F15/03
Inventor 周宏权袁志扬刘赟
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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