Protection device for leak of workpiece platform

Abstract

The invention provides a protection device for leak of workpiece platforms comprising: a bottom plate, a cooling water pipe arranged on the bottom plate, a joint of cooling water and an electric assembly. The protection device for leak includes a leak protective groove mounted on one side of the bottom plate, wherein the cooling water pipe, the joint of cooling water and the electric assembly which needs to perform leak protection are mounted on the side of the bottom plate. Waterproof materials are pasted on the bottom and the side of the leak protection groove. The protection device for leak of workpiece platforms in the invention can design the distribution of the leak protection groove in the bottom plate of a micropositioner based on the needs and realize full-range protection to the bottom plate of the micropositioner. Leak is collected at a position of the leak protection groove for detection and the protection device has a simple structure and few used sensors. The device is convenient for detection and control and saves the cost.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing equipment, in particular to a water leakage protection device for a workpiece table. Background technique [0002] In large-scale integrated circuit production equipment, especially in lithography machines, the integration of various devices is relatively high, including the layout of water, electricity and other pipelines, especially in the micro-motion table of lithography machines. Please see figure 1 , figure 1 It is a structural schematic diagram of a micro-movement stage of a lithography machine in the prior art. Such as figure 1 As shown, there are motor mounts 11 , cooling water pipes 12 , cooling water connectors 13 , electrical connectors 14 , and electrical cables 15 distributed on the bottom plate of the micro-motion stage 10 . Due to the improvement of the efficiency of the lithography machine, the acceleration and speed of the movement of the micro-motion tabl...

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a water leakage protection device for the workpiece table to solve the problem that the workpiece table in the prior art cannot detect the water leakage of the micro-motion table sensitively and effectively prevent the water leakage from causing damage to the micro-motion table

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