Surface treatment method of low temperature plasma of granular material and device thereof

A low-temperature plasma and surface treatment device technology, applied in the direction of plasma, discharge tube, electrical components, etc., can solve the problems of poor treatment uniformity, poor treatment effect, low treatment efficiency, etc., and achieve simple loading and unloading, convenient operation, and high treatment efficiency high efficiency effect

Inactive Publication Date: 2012-10-24
SUZHOU OPS PLASMA TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] For granular materials, such as round particles and parts with small three-dimensional dimensions, due to their accumulation characteristics, the raw materials are easy to accumulate and cover when using the usual flat electrode plasma treatment, so the surface that is not exposed to the plasma atmosphere cannot be obtained. processing, resulting in poor processing uniformity, low processing efficiency, and poor processing effect

Method used

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  • Surface treatment method of low temperature plasma of granular material and device thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Example 1: Low-temperature plasma cleaning treatment on the surface of solder balls

[0024] Weigh 100 grams of tin balls, introduce them into the drum 1, and seal the drum 1. Vacuumize the inside of the drum 1 to 5 Pa, feed oxygen quantitatively, and maintain the vacuum in the drum 1 at 40 Pa. Turn on the drum 1 to rotate and apply a high-frequency electric field to form plasma in the drum 1, maintain a discharge power of 100W, and stop vacuuming and gas feeding after 20 minutes of processing time. Fill the drum 1 with pure air to make the pressure inside and outside the drum 1 equal, then open the drum 1, take out the processed materials, and the treatment is over.

Embodiment 2

[0025] Embodiment 2: Low-temperature plasma activation treatment of plastic parts

[0026] The material of the plastic parts is polypropylene (PP), and the three-dimensional dimensions of the parts are length: 8mm, width: 5mm, height: 4mm.

[0027] 2 grams of plastic parts are weighed, introduced into drum 1, and drum 1 is sealed. Vacuumize the inside of the drum 1 to 5 Pa, feed oxygen quantitatively, and maintain the vacuum in the drum 1 at 40 Pa. Turn on the drum 1 to rotate and apply a high-frequency electric field to form plasma in the drum 1, maintain a discharge power of 150W, and stop vacuuming and gas feeding after 30 minutes of processing time. Fill the drum 1 with pure air to make the pressure inside and outside the drum 1 equal, then open the drum 1, take out the processed materials, and the treatment is over

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Abstract

The invention provides a surface processing method of low temperature plasma of a granular material. The method comprises the steps of placing the granular material into a rotary drum; performing surface treatment on the granular material; vacuumizing the rotary drum and introducing a reaction gas quantitively; and generating glow discharge plasma by applying an electric field in the rotary drum. A surface treatment device of the low temperature plasma of the granular material comprises a rotary drum, an electrode, a gas feed inlet, a baffle, a granular material, a plasma generating power supply and an extraction opening. According to the method, raw materials are not easy to accumulate and cover, and the surfaces exposed in the plasma atmosphere are better processed, and the processing uniformity is good, the processing efficiency is high, and the processing effect is ideal.

Description

technical field [0001] The invention relates to a low-temperature plasma surface treatment method and device for granular materials. Background technique [0002] Material surface modification technology is one of the commonly used material preparation technologies at present. Its basic principle is that under certain external conditions, the external substances of the material and the surface of the material undergo physical or chemical reactions, so that the state of the material surface changes or the surface of the material changes. Produce new elements and new groups, and finally meet the needs of practical applications. At present, the method of material surface treatment is usually the liquid phase reaction method. Because the liquid phase reaction method has the disadvantages of high energy consumption and pollution to the environment, an energy-saving and environmentally friendly method is urgently needed to replace it. [0003] Low-temperature plasma surface treat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/24H01J37/317
Inventor 王红卫
Owner SUZHOU OPS PLASMA TECH
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