Surface multi-point focusing system and surface multi-point focusing method

Abstract

The invention discloses a surface multi-point focusing system used for an image measuring instrument, wherein the image measuring instrument comprises a CCD (Charge Coupled Device) located at the axis Z. The system comprises a selection module, a calculation module and an output module. The selection module is used for determining a focusing point selection mode; the calculation module is used for calculating a first position coordinate of each focusing point in each image of a work piece obtained by the CCD when the CCD moves in a predetermined focusing range, and determining an adjusted focusing range; the calculation module is further used for calculating a second position coordinate of each focusing point in each image of the work piece obtained by the CCD when the CCD moves in the adjusted focusing range; and the output module is used for outputting the second position coordinate of the focusing point in the adjusted focusing range. The invention further provides a surface multi-point focusing method. By the system and the method provided by the invention, multi-point focusing can be executed on the surface of the work piece so as to obtain measurement data.

Description

technical field [0001] The invention relates to a measurement technology, in particular to a system and method for performing multi-point focusing on the surface of a workpiece to realize measurement. Background technique [0002] The image measuring instrument is a kind of coordinate measuring machine, which can use an optical microscope to magnify and image the object to be measured at a free magnification, and transmit the enlarged image of the object to be measured to the computer connected to the instrument through the CCD camera system for Non-contact and efficient detection of geometric quantities of various complex workpieces. [0003] In the process of measuring the workpiece by the vision measuring instrument using the vision measuring system (Vision Measuring System, VMS), it is necessary to measure and evaluate the height of every minute point on the surface of the workpiece. However, the measurement of the fine points often requires the use of auxiliary equipmen...

AI Technical Summary

Problems solved by technology

[0003] In the process of measuring the workpiece by the vision measuring instrument using the vision measuring system (Vision Measuring System, VMS), it is necessary to measure and evaluate the height of every minute point on the surface of the workpiece. However, the measurement of the fine points often requires the use of auxiliary equipment In order to meet customer requirements

In this way, it will inevitably lead to low measurement efficiency and increased error

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