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Flowrate sensor and flowrate detection device

A flow sensor and flow detection technology, which is applied in the field of flow sensors, can solve problems such as unexplained flow sensors, and achieve the effects of miniaturization, shortened connections, and improved reliability

Inactive Publication Date: 2012-11-21
KIKUCHI SEISAKUSHO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In Patent Document 1 and Patent Document 2, although it has been disclosed that an acceleration sensor, an angular velocity sensor, and a pressure sensor are constituted by a semiconductor sensor having a microelectromechanical system (MEMS) chip, the flow rate sensor is not described in these.

Method used

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  • Flowrate sensor and flowrate detection device
  • Flowrate sensor and flowrate detection device
  • Flowrate sensor and flowrate detection device

Examples

Experimental program
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Effect test

Embodiment 1

[0047] Figures 1 to 4 In , reference numeral 10 is a flow sensor, which is housed in a surface mount type package 12 . Package 12 is a small package with four sides of about 8 mm, such as image 3 As shown, the package body 12 is laminated with a lower substrate 14, an upper substrate 16, a cover plate 18, and a label 20 and fixed. The lower substrate 14, the upper substrate 16, and the cover 18 are made of hard resin.

[0048] Depend on image 3 , 4 It can be seen that, on the upper surface of the lower substrate 14 , the sensor chip housing chamber 22 is formed at a position eccentric from the center to one side, and has a quadrangular plan view. The storage chamber 22 is a quadrangular shape in which the sides of the bottom portion 24 are shorter than the sides of the upper portion 26 , and the two quadrangular shapes overlap concentrically through a horizontal step portion 28 . A sensor chip 42 to be described later is fixed on the stepped portion 28 .

[0049] In t...

Embodiment 2

[0061] Figure 10-12 is a flow detection device using this flow sensor. In these figures, reference numeral 80 is a main pipe forming a main passage 82 through which fluid passes. A substrate accommodating portion 84 is integrally formed on the pipe arm of the main pipe 80 along the longitudinal direction thereof. A control board 86 is housed in the board housing portion 84 . The flow sensor 10 and its output signal amplifying circuit are installed on the upper surface of the control board 86, and other computing circuits such as a circuit for adjusting gain or bias voltage may also be installed in advance as required.

[0062] Here, the flow sensor 10 takes a straight line 34 passing through the center of the diaphragm 48 (refer to image 3 ) is parallel to the main flow path 82 and fixed so that the inflow port 30 is located on the upstream side of the main flow path 82 rather than the outflow port 32 . In addition, a connection member 88 located below the flow sensor 10...

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PUM

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Abstract

Disclosed is a flowrate sensor having a flowrate detection means built into a surface mounted package. The flowrate sensor is equipped with: a fluid path (70) that is formed within the package (12), and which draws fluid from a fluid intake (30) provided to the underside of the package (12) to a fluid outlet (32) provided to the underside of the package (12) passing via a flowrate detection means; and an external terminal (40) that is provided to the outer surface of the package (12), and through which the electric output of the flowrate detection means is drawn. The flowrate sensor can be used for both fluids and gases. The flowrate sensor can be miniaturized, can be surface mounted on an electronic circuit board and the like, and is highly reliable.

Description

technical field [0001] The present invention relates to a flow sensor and a flow detection device using the flow sensor. The flow sensor accommodates a microelectromechanical system (MENS) sensor chip in a surface-mounted package and can detect the flow of gas or liquid. Background technique [0002] Micro-Electro-Mechanical System (MEMS: Micro Eelectro Mechanical System) technology, which realizes a system with a three-dimensional microstructure on a substrate by combining machining technology or material technology with semiconductor manufacturing processing technology, has been widely used in recent years. To realize the miniaturization and weight reduction of components such as sensors and pumps. As a sensor using the MEMS (MEMS sensor), for example, an acceleration sensor, an angular velocity sensor, a pressure sensor, and the like are widely used. [0003] In recent years, popularization and commercialization of fuel cell systems are expected as distributed energy dev...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F1/00B81B3/00G01F1/42G01F15/14H01L29/84
CPCG01F15/14G01F1/42G01F1/684G01F1/6842G01F1/383G01F1/46G01F1/6845H01L2224/48091H01L2924/1461H01L2924/00014H01L2924/00G01F1/00B81B3/00
Inventor 椛泽康成大冈二郎
Owner KIKUCHI SEISAKUSHO CO LTD