Short flow processing method of aspheric optical element

A technology of optical parts and processing methods, applied in the processing field of aspheric optical parts, can solve the problems of low certainty and long processing cycle, and achieve the effect of improving processing efficiency and saving processing time

Active Publication Date: 2012-12-26
NAT UNIV OF DEFENSE TECH
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Problems solved by technology

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of long processing cycle and low certainty in the exist

Method used

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  • Short flow processing method of aspheric optical element
  • Short flow processing method of aspheric optical element
  • Short flow processing method of aspheric optical element

Examples

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Example Embodiment

[0026] Examples:

[0027] Choose an off-axis aspheric mirror with φ=290mm for polishing experiment. The off-axis aspherical mirror described in this embodiment is a quadric surface, its geometric size is φ=290mm, and its effective aperture is The radius of curvature of the vertex is R = 1006mm, the quadratic term constant k = -1, α 1 , Α 2 , Α 3 , Α 4 All are 0, the off-axis amount is 250mm, and the surface shape accuracy requires the effective light aperture Better than λ / 50RMS, where λ=632.8nm.

[0028] First of all, for the off-axis aspheric mirror formed by the rotating curved surface with Z as the axis in the three-dimensional coordinate system, the following formula is usually used to describe:

[0029] Z = cr 2 1 + 1 - ( 1 + k ) c 2 r 2 + α 1 r 4 + α 2 r 6 + α 3 r 8 + α 4 r 10

[0030] Where r 2 = X 2 +y 2 , X is the X coordinate of the point (x, y) on the rotating surf...

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Abstract

The invention discloses a short flow processing method of an aspheric optical element. The short flow processing method comprises the following steps: firstly carrying out grinding and rough polishing on the aspheric optical element, and carrying out damage removing by magnetorheology according to the requirement; carrying out judging by a ratio of a surface-shape error peak-valley value obtained by surface-shape error measurement and a surface-shape error root-mean-square value, if the ratio is less than 10, entering a magnetorheology shape modification iteration processing step to eliminate a low-frequency surface-shape error, and finishing processing until reaching the surface precision requirement; and otherwise, adopting a computer to control a gadget fairing iteration processing step to remove the middle-frequency and the high-frequency surface-shape errors until the surface-shape error measurement and analysis result shows that the ratio of the surface-shape error peak-valley value and the surface-shape error root-mean-square value is less than 10, and entering the magnetorheology shape modification iteration processing step to eliminate the low-frequency surface-shape error until the surface precision satisfies the requirement. The short flow processing method provided by the invention has the advantages of high efficiency and high precision.

Description

technical field [0001] The invention relates to a processing method of an optical part, in particular to a processing method of an aspheric optical part. Background technique [0002] The manufacture of aspheric surfaces is very complicated and requires a special measurement system. Although the traditional processing method is relatively mature, it requires professional craftsman skills, poor certainty, and the efficiency of manual repair and polishing is very low. [0003] The traditional computer-controlled small tool (grinding head) polishing can eliminate the remaining grinding damage after rough polishing, and has a smoothing effect on the surface shape. However, although the CNC small tool polishing technology has been developed to a certain extent, due to the small grinding head processing When the surface is aspherical, the polishing disk and the mirror surface cannot be completely "fitted", resulting in the concentration of the polishing glue and the polishing liqu...

Claims

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Application Information

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IPC IPC(8): B24B1/00
Inventor 胡皓石峰王寅戴一帆彭小强宋辞
Owner NAT UNIV OF DEFENSE TECH
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