Multi-ring parallel connection type capacitance displacement sensor

Abstract

The invention discloses a multi-ring parallel connection type capacitance displacement sensor which comprises a mobile pole and a fixed pole, wherein the fixed pole comprises a single-sided fixed pole shaft, a dual-sided ring fixed pole plate and a single-sided ring fixed pole plate which are coaxial and are arranged from inside to outside; the mobile pole comprises a first dual-sided ring mobile pole plate and a first dual-sided ring mobile pole plate which are coaxial and are arranged corresponding to the fixed pole; and when the mobile pole moves along the axial direction relative to the fixed pole following an object to be measured, more than four groups of ring-shaped parallel connection capacitors can be formed, therefore, the mobile object to be measured drives the mobile pole plate to move along the axial direction, effective covering areas between every two pole plates of all groups of capacitors generate variables with same forms, differential variable quantities of all groups of capacitors are accumulated, on the premise of unchanged volume, the total variable quantity of the area between the mobile pole and the fixed pole during jogging is greatly increased, the total variable quantity of the capacitors during jogging is increased, therefore, the precision and the sensitivity during microspur measurement are greatly improved, and the demand of a miniature application occasion can be met.

Description

technical field [0001] The invention relates to the field technology of capacitive displacement sensors, in particular to a multi-ring parallel capacitive displacement sensor. Background technique [0002] With the continuous development of science and technology, the demand for high-precision displacement measurement and non-contact measurement is increasing, and the application of capacitance micrometry technology is also becoming wider and wider. With the shortcomings of distributed capacitance and nonlinearity in capacitive sensors being overcome, high-precision, high-stability capacitive micrometer products have come out one after another. The high-precision capacitance micrometer can achieve extremely high resolution and has good frequency response characteristics, so it has become one of the main detection sensors for feedback control of high-precision micro-motion platforms in recent years. [0003] At present, the existing capacitive displacement sensors mainly fal...

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Problems solved by technology

[0009] It is not difficult to see from the above content that in order to improve the sensitivity and range of the sensor, it is necessary to increase the facing area and pole distance of the plates, so that it is difficult to achieve miniaturization in volume, which greatly limits the application of capacitive sensors.

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