Silicon wafer cleaning device and liquid storage pot
A liquid storage tank and liquid storage bag technology, which is applied in the field of semiconductors, can solve the problems of false alarms by the liquid level sensor 13, difficulty in distinguishing the actual height of the chemical agent 14, and the inability to observe the actual liquid level of the liquid display tube 12, etc., to achieve The effect of avoiding contamination and reducing errors
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[0033] The embodiment of the invention discloses a silicon wafer cleaning device and a liquid storage tank thereof, so as to achieve the purpose of reducing the generation of contaminants in the liquid display tube.
[0034] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0035] Such as figure 2 Shown liquid storage tank, this liquid storage tank comprises main tank body 21 and liquid display tube 22, one end of liquid display tube 22 is open, and the other end communicates with main tank body 21, between liquid ...
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