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Echelle grating spectrometer, atomic emission spectrometer and spectrum testing method

An echelle grating and atomic emission technology, which is applied in the field of spectroscopy, can solve problems such as performance that cannot meet the test requirements, and achieve the effects of less sample consumption, high sensitivity, and high sensitivity

Inactive Publication Date: 2013-01-16
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the limitation of the development level of the detector, the spectral range of the échelle grating spectrometer with this structure is only 400nm-800nm, and its performance still cannot meet the test requirements of ICP-AES

Method used

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  • Echelle grating spectrometer, atomic emission spectrometer and spectrum testing method
  • Echelle grating spectrometer, atomic emission spectrometer and spectrum testing method
  • Echelle grating spectrometer, atomic emission spectrometer and spectrum testing method

Examples

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Embodiment 1

[0045] The characteristic wavelength of the Se element in the mixed solution is 203.985nm (take the characteristic spectral line energy as an example, which is stronger and easier to distinguish, the same below), and the incident angle of the cross-dispersive prism 5 is 27.56° in the waveband range of 200nm-400nm. The measured spectral line position (69, 213), the measured wavelength is 203.986nm, and the wavelength accuracy error is 0.001nm.

Embodiment 2

[0047] The characteristic wavelength of the Zn element in the mixed solution is 213.856nm, within the band range of 200nm-400nm, the incident angle of the cross-dispersion prism 5 is 27.56°, the measured spectral line position (132,222), the measured wavelength is 213.861nm, and the wavelength accuracy error is 0.005nm .

Embodiment 3

[0049] The characteristic wavelength of the Mn element in the mixed solution is 257.610nm, within the band range of 200nm-400nm, the incident angle of the cross-dispersion prism 5 is 27.56°, the measured spectral line position (315,250), the measured wavelength is 257.614nm, and the wavelength accuracy error is 0.004nm .

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Abstract

The invention relates to an echelle grating spectrometer, an atomic emission spectrometer based on the echelle grating spectrometer, and a spectrum testing method by virtue of the atomic emission spectrometer. According to the invention, an echelle grating is adopted as a main dispersion element; light rays emitted by a light source are focused at an incident pinhole by a collecting lens, outgoing beams at the incident pinhole are collimated by a collimating lens and then enter the echelle grating for main chromatic dispersion, then enter a cross dispersing prism for crosswise chromatic dispersion, and are finally imaged onto an image surface of a CCD (Charge Coupled Device) by a focus lens after crosswise chromatic dispersion; through changing the incident angle of the cross dispersing prism, rapid measurement of wave bands within 200 nm and 900 nm can be realized, and the advantages of wide wave band, high resolution, high sensitivity, low noise and small size can be achieved. As shown in the testing results, the test is simple and convenient, the sensitivity is high, the sample consumption is low, and the rapid measurement of multiple elements of the wide wave bands can be realized.

Description

technical field [0001] The invention belongs to the field of spectrum technology, and relates to an échelle grating spectrometer, in particular to an échelle grating-based atomic emission spectrometer and a spectral testing method based on the échelle grating spectrometer. Background technique [0002] Inductively coupled plasma atomic emission spectrometry is one of the most widely used elemental analysis methods in the field of materials. (2002 Jilin University Master Thesis "Design and Research of Spectral Acquisition Scheme of ICP-AES Spectrometer Based on CCD", 2007 Tianjin University Master Thesis "Development of ICP Scanning Spectrometer") reported on the inductively coupled plasma atomic emission spectrometer (ICP -AES), which uses the information provided by the atomic emission characteristic spectrum for elemental analysis, has the advantages of simultaneous, rapid and direct determination of multiple elements, and plays a huge role in industrial production such as...

Claims

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Application Information

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IPC IPC(8): G01J3/28G01J3/443G01N21/71
Inventor 陈少杰宁春丽崔继承巴音贺希格齐向东唐玉国
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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