Vibrating micro mechanical electric field sensor

Abstract

The invention relates to a vibrating micro mechanical electric field sensor. The vibrating micro mechanical electric field sensor comprises a base and a sensitive layer and a shielding layer which are arranged on the base. The shielding layer comprises a movable structure and a fixed comb tooth structure, wherein the movable structure comprises a rectangular mass block, comb teeth and supporting beams, wherein a gap is reserved at the center of the rectangular mass block; the comb teeth are arranged around the mass block; and the supporting beams are connected with four end corners of the mass block. According to the invention, a parallel-plate capacitor can be utilized to load static electricity to tune the resonant frequency of the movable structure in the shielding layer; the vibrationdamping aiming at the movable structure in the shielding layer is tuned by the differential feedback of a vibration velocity signal; the normal pressure packaging of the vibrating micro mechanical electric field sensor is implemented; the high sensitivity can be implemented and the stability of an output signal can be improved; and the key problems of compensation on a manufacturing error, packaging, stability of the output signal and the like in an existing micro mechanical electric field sensor are solved.

Description

technical field [0001] The invention relates to an electric field sensor, in particular to a vibrating micromechanical electric field sensor, which can tune the resonant frequency and quality factor of the electric field sensor through static electricity. Background technique [0002] Electric field sensor is a device for measuring electric field intensity, which is widely used in many fields such as national defense, aerospace, weather detection, electric power, earthquake prediction, scientific research and industrial production, and plays a very important role. For example, with the help of electric field sensors to monitor changes in the ground and air atmospheric electric fields, accurate meteorological information can be obtained, thereby providing safety guarantees for launching missiles, satellites and other aircraft; in the field of industrial production, using electrostatic field sensors to monitor The potential distribution and electric field distribution help us ...

AI Technical Summary

Problems solved by technology

[0007] According to the above description, the existing vibrating micromechanical electric field sensors have not yet proposed an effective solution to the accumulation of package charge and output stability, nor have they proposed a compensation method for the error in the manufacturing process.

Images