Workbench with three degrees of freedom at Z-Theta x-Theta y, high coaxiality, bending moment and nanometer precision

A workbench and coaxiality technology, applied to the parts of the instrument, instruments, etc., can solve the problems of lack of rotation freedom, reduce the precision of the micro-positioning workbench, damage the piezoelectric ceramic driver, etc., and achieve simple and reliable structure. Simple, the effect of improving motion or positioning accuracy

Active Publication Date: 2014-09-17
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

Of the above two workbenches, the former is dominated by axial translation and lacks rotational freedom; while the latter can only rotate around one axis
In addition, since this type of micro-motion structure is mostly driven by piezoelectric ceramics, and piezoelectric ceramics cannot withstand excessive bending moments, when there is a certain bending moment and torque on the micro-positioning table, the accuracy of the micro-positioning table may be reduced. even damage the piezoelectric ceramic driver

Method used

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  • Workbench with three degrees of freedom at Z-Theta x-Theta y, high coaxiality, bending moment and nanometer precision
  • Workbench with three degrees of freedom at Z-Theta x-Theta y, high coaxiality, bending moment and nanometer precision
  • Workbench with three degrees of freedom at Z-Theta x-Theta y, high coaxiality, bending moment and nanometer precision

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Embodiment Construction

[0021] The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following the described embodiment.

[0022] As shown in FIG. 1 , the example of the present invention includes a three-flexible-hinge circular piece workbench 7 , and the workbench 7 is connected to the outer cylinder 5 through three flexible-hinge circular piece worktable connecting screws 6 . Three piezoelectric ceramic drivers 4 are arranged on one side of the three-flexible-hinge circular sheet workbench 7 . The piezoelectric ceramic drivers are evenly distributed around the circumference, and their working ends are in close contact with the three-flexible-hinge circular sheet worktable 7; their fixe...

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Abstract

The invention discloses a workbench with three degrees of freedom at Z-Theta x-Theta y, high coaxiality, bending moment and nanometer precision, which comprises a piezoelectric ceramic driver, a screw of the piezoelectric ceramic driver, an end cover of the piezoelectric ceramic driver, an end cover screw of the piezoelectric ceramic driver, an outer cylinder, a three-flexible hinge round workbench and a connecting screw of the three-flexible hinge round workbench. The workbench has a compact structure and can realize the non-coupling movement or positioning with three degrees of freedom at Z-Theta x-Theta y and nanometer precision. Meanwhile, the workbench can bear certain bending moment and moment load. The coaxiality of the bearing object on the workbench and the excircle or the inner bore of the workbench can be improved through the centering trimming process.

Description

technical field [0001] The invention relates to a micro-drive and micro-positioning workbench mechanism in precision machinery technology, in particular to a Z-θx-θy three-degree-of-freedom nanometer-level precision non-coupling motion or positioning workbench, which can carry a certain Bending moment, torque load; and can improve the coaxiality between the load on the workbench and the outer circle of the workbench through the centering trimming process, which can be used in optical instruments, precision measurement, biomedicine, microelectronic device manufacturing and other fields. Background technique [0002] Micro-positioning and micro-manipulation technology is one of the foundations of high-precision instruments, and has a wide range of applications and demands in the fields of ultra-precision detection (such as: scanning probe microscope) and biomedical fields (such as: intracellular drug injection). At present, this technology mostly uses piezoelectric ceramics (P...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00
Inventor 翟嘉谭大川吴永前张灿
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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