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Surface acoustic wave temperature sensor

A temperature sensor, surface acoustic wave technology, applied in thermometers, thermometers with physical/chemical changes, instruments, etc., can solve the problem that the reader cannot receive the sensing signal normally

Active Publication Date: 2014-04-09
苏州光声纳米科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the strong electromagnetic interference and the signal of the SAW temperature sensor have the same frequency, the reader cannot receive the sensing signal normally
[0005] At present, there is no effective solution for SAW sensors to eliminate environmental noise and strong electromagnetic interference.

Method used

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Examples

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Embodiment Construction

[0025] The present invention will be described in further detail below in conjunction with preferred embodiments.

[0026] The surface acoustic wave sensor of the present invention, such as image 3 and 4 As shown, a plurality of SAW devices 5 are included, and the SAW devices 5 include a piezoelectric substrate 2, an interdigital transducer 1 and a reflective grating 3 arranged on the piezoelectric substrate 2, and the plurality of SAW devices 5 Can be set on different piezoelectric substrates 2, such as image 3 As shown, the interdigital transducers 1 and reflective gratings 3 of the plurality of SAW devices 5 can also be arranged on the same piezoelectric substrate 2, such as Figure 4 shown.

[0027] The SAW device 5 can adopt a resonant structure in which the interdigital transducer 1 and the reflective grating 3 are mixed, such as figure 1 As shown, a delay line structure in which the interdigital transducer 1 and the reflective grating 3 are separately arranged can...

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Abstract

The invention provides a surface acoustic wave temperature sensor comprising more than two SAW (surface acoustic wave) devices arranged on a base, wherein each SAW device comprises a piezoelectric substrate, an inter-digital transducer and a reflecting grating; the inter-digital transducer and the reflecting grating are arranged on the piezoelectric substrate; the temperature coefficients of the piezoelectric substrates of any two SAW devices are different; a monotonous or linear relation is formed by frequencies and temperatures of the piezoelectric substrates of the SAW devices; the frequency difference of the piezoelectric substrates of any two SAW devices is not zero; and the temperature detected by the surface acoustic wave temperature sensor is obtained through the frequency difference of the piezoelectric substrates of any two SAW devices. According to the surface acoustic wave temperature sensor, the temperature detected by the surface acoustic wave temperature sensor can be calculated through the frequency difference between the two SAW devices, and the problem of resisting environmental noises and electromagnetic interferences of the existing SAW sensor can be solved.

Description

technical field [0001] The invention relates to a surface acoustic wave (Surface Acoustic Wave, SAW) temperature sensor, in particular to a surface acoustic wave temperature sensor capable of simultaneously realizing resistance to environmental noise and electromagnetic interference. Background technique [0002] At present, the known SAW temperature sensor structure includes a single surface acoustic wave device, and the surface acoustic wave device includes a resonator structure and a delay line structure, specifically including a piezoelectric substrate, a SAW interdigital transducer placed on the substrate, and a reflective grid. [0003] When the SAW device is in contact with the temperature measurement point under working conditions, the chip frequency of the SAW device will drift due to thermal expansion and contraction, so that the temperature of the temperature point to be measured can be obtained according to the measurement frequency drift. As stated in the articl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K11/26
Inventor 李强李红浪
Owner 苏州光声纳米科技有限公司
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