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Liquid static pressure movement platform

A motion platform and static pressure technology, which is applied in the direction of large fixed members, metal processing machinery parts, measuring/indicating equipment, etc., can solve the problems of platform motion accuracy and other problems, and achieve the effect of improving motion accuracy and eliminating return error

Inactive Publication Date: 2013-03-06
KUNSHAN YUNCO PRECISION IND TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are defects in this structure, the vibration of the motor and the transmission error of the screw will affect the motion accuracy of the platform

Method used

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  • Liquid static pressure movement platform

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Embodiment Construction

[0009] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0010] figure 1 Shown is a hydrostatic motion platform according to an embodiment of the present invention, comprising: a main body including a slide table 1, a guide rail 2 and a base 3; the guide rail 2 is installed on the base 3, and the slide is embedded in a groove thereof Platform 1; driving device, which includes a mover 4, a stator 5 and a three-way oil distribution block 6; the stator 5 is installed on the base 3; one end of the mover 4 is embedded in the groove of the stator 5, The other end is fixed on the lower surface of the slide table 1; the three-way oil distribution block 6 is installed on the upper surface of the slide table 1; a position detection device, which includes a grating ruler 7 and a reading head 8; the grating The ruler 7 is installed on the side surface of the slide table 1 , and its scale surface is a...

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Abstract

The invention provides a liquid static pressure movement platform which comprises a platform main body, a driving device and a position detection device; the platform main body comprises a sliding table, guide rails and a base; the guide rails are arranged on the base, and the sliding table is inlaid in the grooves of the guide rails; the driving device comprises a rotor, a stator and three oil distribution blocks; the stator is arranged on the base; one end of the rotor is inlaid in the groove of the stator, and the other end of the rotor is fixedly arranged on the lower surface of the sliding table; the three oil distribution blocks are arranged on the upper surface of the sliding table; the position detection device comprises a grating ruler and a reading head; the grating ruler is arranged on the side surface of the sliding table, and the scale surface of the grating ruler is jointed with the reading head; and the reading head is fixedly arranged on the guide rails. According to the liquid static pressure movement platform, because a linear motor is adopted to drive, the problem of hysterisis error in the transmission of a ball bearing lead screw is solved; and due to the position detection device for compensating movement errors, the movement precision of the platform is improved.

Description

technical field [0001] The invention relates to the field of precision motion platforms, in particular to a hydrostatic motion platform. Background technique [0002] The hydrostatic motion platform uses pressure to introduce liquid into the oil chamber, forming an oil film between the slide table and the guide rail, and the oil film makes the contact surface between the slide table and the guide rail in a state of liquid friction. Compared with the mechanical guide rail platform, it has advantages in terms of driving power, service life, bearing capacity, vibration resistance, flexibility, etc. [0003] The relevant hydrostatic motion platform adopts open-loop and semi-closed-loop control methods, and the ball screw is driven by the rotating motor to drive the slide table to move on the guide rail. However, there are defects in this structure. Both the vibration of the motor and the transmission error of the screw will affect the motion accuracy of the platform. Contents...

Claims

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Application Information

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IPC IPC(8): B23Q1/38B23Q17/24
Inventor 赵春花
Owner KUNSHAN YUNCO PRECISION IND TECH
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