Non-zero interference aspheric surface measurement return error removal method and device

A backhaul error and aspheric surface technology, applied in the field of optical measurement, can solve the problems of inapplicable fast measurement and reduce the efficiency of solving surface error, etc.

Active Publication Date: 2022-07-26
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

In addition, the reverse optimization method requires multiple iterative optimization of the optimization variables, which greatly reduces the efficiency of solving surface error, and is not suitable for rapid measurement in industrial production

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  • Non-zero interference aspheric surface measurement return error removal method and device
  • Non-zero interference aspheric surface measurement return error removal method and device
  • Non-zero interference aspheric surface measurement return error removal method and device

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[0034] In order to make those skilled in the art better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only Embodiments are part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0035] It should be noted that the term "comprising" and any modification in the description and claims of the present invention and the above drawings are intended to cover non-exclusive inclusion, for example, a process, method, device including a series of steps or units , products or devices are not necessarily limited to those steps or units...

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Abstract

The non-zero interference aspheric surface measurement return error removal method and device have good universality, can eliminate the return error, and combine with the ray tracing function of optical software to achieve fast and high-precision measurement of aspheric surface errors . The method includes: (1) using optical software simulation to establish an optical model of the aspherical interference system to be measured; (2) obtaining a training set for eliminating backhaul errors, the training set includes several groups of surface error data of the surface to be measured and corresponding optical The system interference wavefront data are generated by computer simulation; (3) construct a neural network to eliminate the return error; (4) train the neural network to eliminate the return error; (5) use the trained neural network to solve the aspheric shape error.

Description

technical field [0001] The invention relates to the technical field of optical measurement, in particular to a non-zero interference aspheric surface measurement return error removal method and a non-zero interference aspheric measurement return error removal device, which are mainly used for fast and high-precision measurement of aspheric surface shape errors. Background technique [0002] Aspheric optical elements refer to a class of optical elements whose surface curvature is a non-fixed value. It can simplify the structure in optical design, realize the function of multiple aspherical mirrors with a single aspherical mirror, and at the same time, it has the advantages of correcting various aberrations and increasing the degree of freedom of optical design. It is widely used in astronomical telescopes and aerospace cameras. in the optical system. Therefore, strict requirements are put forward for the precise measurement of the aspheric surface shape error. [0003] Amon...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06F30/20G06N3/08G06N3/02
CPCG06N3/08G06N3/02
Inventor 郝群胡摇汪文莉袁诗翥
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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