Unlock instant, AI-driven research and patent intelligence for your innovation.

Microscope objective lens

A technology of microscope objective lens and lens, applied in the field of microscope objective lens, can solve the problems such as insufficient action distance and large opening number, etc.

Active Publication Date: 2013-03-06
NIKON CORP
View PDF6 Cites 12 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, although such a conventional microscope objective lens has a large number of openings and can correct chromatic aberration well, it cannot be said that it has a sufficient operating distance for the operability of a microscope device equipped with this microscope objective lens.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Microscope objective lens
  • Microscope objective lens
  • Microscope objective lens

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0072] Below, three examples of the microscope objective lens OL according to this embodiment are shown. In each example, the phase difference of the diffractive optical surface D formed in the diffractive optical element GD is based on the use of common refractive indices and the following It is calculated by the ultra-high refractive index method based on the aspheric formula (b). The ultra-high refractive index method refers to a method that utilizes a certain equivalence relationship between the aspherical shape and the grating pitch of the diffractive optical surface. In this embodiment, the diffractive optical surface D is used as the data of the ultra-high refractive index method , that is, expressed by the aspheric surface formula (b) and its coefficients described later. In addition, in this embodiment, d-line, C-line, F-line, and g-line are selected as calculation objects of aberration characteristics. The wavelengths of these d-lines, C-lines, F-lines, and g-lines ...

no. 1 example 〕

[0084] used in the above description figure 1 Shown is the microscope objective lens OL1 of the first embodiment. As described above, the microscope objective lens OL has, in order from the object side, the first lens group G1 having a positive refractive power; the second lens group G2 having a positive refractive power; and the third lens group G3 having a negative refractive power. The first lens group G1 consists of a positive meniscus lens L1 with a concave surface facing the object side, a positive meniscus lens L2 with a concave surface facing the object side, and a negative meniscus lens L3 with a convex surface facing the object side in order from the object side. It is composed of a cemented lens CL11 made of a biconvex lens L4. The second lens group G2 is composed of a cemented lens CL21 formed by cementing a biconvex lens L5, a biconcave lens L6, and a biconvex lens L7, and a flat plate-shaped diffractive optical element GD including a diffractive optical surface ...

no. 2 example

[0117] Hereinafter, as a second embodiment, the image 3 The microscope objective OL2 is shown. Should image 3 The microscope objective lens OL2 shown is also configured to have, in order from the object side, a first lens group G1 having a positive refractive power; a second lens group G2 having a positive refractive power; and a third lens group G3 having a negative refractive power. The first lens group G1 consists of, in order from the object side, a positive meniscus lens L1 with the concave surface facing the object side, a positive meniscus lens L2 with the concave surface facing the object side, a biconvex lens L3, and a biconvex lens L4 bonded with the concave surface facing the object. The cemented lens CL11 is composed of the negative meniscus lens L5 on the side. In addition, the second lens group G2 includes, in order from the object side, a cemented lens CL21 in which a biconvex lens L6, a biconcave lens L7, and a biconvex lens L8 are cemented, a cemented lens...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a microscope objective lens that has a high numerical aperture, is apochromatic with respect to chromatic aberration, and satisfactorily corrects aberration all the way to the perimeter over a long working distance. The microscope objective lens (OL) has, in order from the object side, a first lens group (G1) having positive refractive power, a second lens group (G2) having positive refractive power, and a third lens group (G3) having negative refractive power. The first lens group (G1) has, closest to the object side thereof, a positive meniscus lens (L1) in which the concave surface faces the object. The second lens group (G2) comprises a diffraction optical element (GD) having positive refractive power. This diffraction optical element (GD) is disposed closer to the image than is the section where a light beam passing through the first lens group (G1) and the second lens group (G2) reaches the maximum diameter.

Description

technical field [0001] The present invention relates to microscope objective lenses. Background technique [0002] With the high integration of semiconductors in recent years, the objective lenses used in microscopes for observing specimens such as semiconductors or printed circuit boards need to make tiny patterns into clear images at high magnifications for observation, so it is necessary Performs advanced aberration correction including a large aperture number and chromatic aberration. In addition, a sufficient operating distance is required from the viewpoint of work efficiency and operability. Conventionally, an objective lens disclosed in Patent Document 1, for example, is known as an objective lens capable of correcting chromatic aberration well with a high magnification and a high aperture number. [0003] prior art literature [0004] Patent Document 1: Japanese Patent Laid-Open No. 2009-192988 [0005] However, although such a conventional microscope objective ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/02
CPCG02B27/0037G02B21/02G02B5/005
Inventor 吉田三环子
Owner NIKON CORP