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Power amplifier with transistor input mismatch

A power amplifier and transistor technology, applied in the field of RF power amplifier structure, can solve the problem of power amplifier stability not working

Active Publication Date: 2016-03-23
MKS INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These techniques are ineffective in providing PA stability for certain loads and input signal phases when operating at a fundamental frequency such as 40 megahertz (MHz)

Method used

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  • Power amplifier with transistor input mismatch
  • Power amplifier with transistor input mismatch
  • Power amplifier with transistor input mismatch

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Embodiment Construction

[0016] Example embodiments will now be described more fully with reference to the accompanying drawings.

[0017] Example embodiments are provided so that this disclosure will be thorough, and will fully convey the scope of the invention to those skilled in the art. Numerous specific details are set forth, such as examples of specific components, devices, and methods, to provide a thorough understanding of embodiments of the present disclosure. It will be apparent to those skilled in the art that specific details need not be employed, that example embodiments may be embodied in many different forms and that neither should be construed to limit the scope of the disclosure. In some example embodiments, well-known processes, well-known device structures, and well-known technologies are not described in detail.

[0018] The terminology used in this disclosure is for describing specific example embodiments only and is not intended to be limiting. Singular forms used in the presen...

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Abstract

A power amplifier includes an input module. The input module includes a transformer and is configured to receive a radio frequency signal and generate an output signal. Each of the impedance transformation modules has an output impedance and is configured to receive a corresponding one of the output signals from the transformer. Each of the switch modules includes a transistor, and is connected to an output terminal of one of the impedance transformation modules. The transistor has an input impedance and outputs an amplified signal. Each of the output impedances is mismatched with respect to a corresponding one of the input impedances.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to US Utility Patent Application No. 13 / 222,202, filed August 31, 2011, and claims the benefit of US Provisional Application No. 61 / 381,284, filed September 9, 2010. The entire disclosure of the above application is incorporated by reference into this application. technical field [0003] The present disclosure relates to the stability of radio frequency (RF) power amplifiers and the structure of RF power amplifiers. Background technique [0004] This section provides background information related to the present disclosure. This section is not necessarily prior art. [0005] Various industries use RF power amplifiers to amplify signals to drive voltage standing wave ratio (VSWR) loads. As a non-limiting example, an RF generator may include multiple RF power amplifiers. RF power amplifiers can be used to drive loads, such as plasma chambers. The combined power from these RF power a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03F3/26H03F3/68
CPCH03F1/565H03F3/211H03F2200/534H03F2200/537H03F2203/21103H03F1/086H03F3/2171H03F3/2178H03F3/265H03F3/68H03F3/26
Inventor 克里斯托弗·迈克尔·欧文
Owner MKS INSTR INC