Preparation method and preparation device of tungsten probe for electrical measurement of nanometer device

A technology of nano-devices and probes, which is applied in the field of preparation of tungsten probes for electrical testing of nano-devices and the field of preparation devices, which can solve the problems of small length-to-diameter ratio, sudden change of cone angle, etc., and achieve the effect of saving time and cost

Inactive Publication Date: 2013-04-03
SOUTHEAST UNIV
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  • Abstract
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Problems solved by technology

[0004] Although the method described above is used to fabricate atomic-scale tips, the aspect ratio is often small because only a few microns of the electrolyte interface are corroded, and the change of the cone angle is abrupt.

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  • Preparation method and preparation device of tungsten probe for electrical measurement of nanometer device
  • Preparation method and preparation device of tungsten probe for electrical measurement of nanometer device
  • Preparation method and preparation device of tungsten probe for electrical measurement of nanometer device

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Embodiment Construction

[0022] The present invention will be further explained below in conjunction with the accompanying drawings and specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention. After reading the present invention, those skilled in the art all fall into the appended claims of the present application to the amendments of various equivalent forms of the present invention limited range.

[0023] Such as figure 1 As shown, a preparation device for a tungsten probe for electrical testing of nano-devices includes a support 1, a linear sensor 3, a motor 2, an electrolytic cell 5, an isolation tube 7 and a lifting platform 8, and the electrolytic cell 5 contains 3- 5mol / L NaOH solution, and placed on the lifting table 8; the linear sensor 3 is installed on the bracket 1, and the top is connected with the motor 2, the 0.2mm diameter tungsten wire 4 is connected with th...

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Abstract

The invention discloses a preparation method and a preparation device of a tungsten probe for electrical measurement of a nanometer device. The principle of the method is to obtain the tungsten probe by an electrochemical corrosion tungsten filament, wherein the tungsten filament is taken as an anode and soaked in electrolyte; the tungsten filament is lifted when the current of the tungsten filament is reduced to 20mA; and the tungsten filament is taken as a cathode by reverse current and lifted to depart from the electrolyte at the moment when the tungsten filament is cut off by corrosion, so as to obtain the tungsten probe. The tungsten tipped probe with large draw ratio can be prepared by the preparation method; meanwhile, the reverse current when the tungsten filament is cut off is detected; and the taper corner at the tip of the tungsten probe can be estimated in advance, so as to save the time and cost needed in subsequent procedure that an electron scanning microscope is needed to observe and confirm in the traditional method.

Description

technical field [0001] The invention mainly relates to a method and a preparation device for preparing a tungsten probe used for electrical testing of nanometer devices through an electrochemical corrosion method. Background technique [0002] With the improvement of the integration level of semiconductor integrated circuits, the size of devices is continuously reduced, and the current mainstream semiconductor transistors have reached a feature size of 22 nanometers. In order to measure the electrical characteristics of a single small-sized device, the diameter of the metal probe in contact with the device needs to be small enough. In particular, the transistor is a four-terminal device. When measuring, four metal probes are required to still have enough space to move freely in a small area, which requires the aspect ratio (length / diameter) of the metal probe to be large enough . For example, a probe with a small length-to-diameter ratio (3:1) will touch other metal probes...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25F3/08
Inventor 吴幸于开浩孙立涛
Owner SOUTHEAST UNIV
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