Preparation method and preparation device of tungsten probe for electrical measurement of nanometer device

Abstract

The invention discloses a preparation method and a preparation device of a tungsten probe for electrical measurement of a nanometer device. The principle of the method is to obtain the tungsten probe by an electrochemical corrosion tungsten filament, wherein the tungsten filament is taken as an anode and soaked in electrolyte; the tungsten filament is lifted when the current of the tungsten filament is reduced to 20mA; and the tungsten filament is taken as a cathode by reverse current and lifted to depart from the electrolyte at the moment when the tungsten filament is cut off by corrosion, so as to obtain the tungsten probe. The tungsten tipped probe with large draw ratio can be prepared by the preparation method; meanwhile, the reverse current when the tungsten filament is cut off is detected; and the taper corner at the tip of the tungsten probe can be estimated in advance, so as to save the time and cost needed in subsequent procedure that an electron scanning microscope is needed to observe and confirm in the traditional method.

Description

technical field [0001] The invention mainly relates to a method and a preparation device for preparing a tungsten probe used for electrical testing of nanometer devices through an electrochemical corrosion method. Background technique [0002] With the improvement of the integration level of semiconductor integrated circuits, the size of devices is continuously reduced, and the current mainstream semiconductor transistors have reached a feature size of 22 nanometers. In order to measure the electrical characteristics of a single small-sized device, the diameter of the metal probe in contact with the device needs to be small enough. In particular, the transistor is a four-terminal device. When measuring, four metal probes are required to still have enough space to move freely in a small area, which requires the aspect ratio (length / diameter) of the metal probe to be large enough . For example, a probe with a small length-to-diameter ratio (3:1) will touch other metal probes...

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Problems solved by technology

[0004] Although the method described above is used to fabricate atomic-scale tips, the aspect ratio is often small because only a few microns of the electrolyte interface are corroded, and the change of the cone angle is abrupt.

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