Isolated voltage and current detection control circuit for high voltage switching power supply
A technology of voltage and current detection and detection circuit, which is applied in the direction of power supply test, current/voltage measurement, control/regulation system, etc. It can solve the problems of high cost of linear optocoupler and difficult power supply isolation, etc., and achieve the goal of simplifying the circuit and reducing the cost Effect
Active Publication Date: 2015-09-30
SOI MICRO CO LTD
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Problems solved by technology
[0005] 1. The voltage setting signal is sent to the error amplifier, and its voltage information needs to be kept, which must be isolated by a linear optocoupler
[0006] 2. The signal from the error amplifier to the main control circuit needs to be isolated by an optocoupler
[0009] It can be seen that the existing technical solutions are relatively complicated and require multiple isolation devices, among which the cost of linear optocouplers is relatively high; if it is necessary to isolate thousands of volts, the power isolation part is difficult to implement
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[0024] Such as Figure 4 As shown, the isolated voltage and current detection control circuit of the high-voltage switching power supply provided by the embodiment of the present invention includes an optical input circuit 1, a current difference detection circuit 2, a current difference output circuit 3 and a reference current input circuit. Wherein, the optical input circuit 1 is connected to the current difference detection circuit 2 . The current difference detection circuit 2 is connected 4 with the reference current input circuit. The current difference output circuit 3 is connected to the current difference detection circuit 2 . The light input circuit 1 includes a resistor R1 and a light emitting diode in the optocoupler OC1, and the resistor R1 is connected in series with the light emitting diode in the optocoupler OC1. The current difference detection circuit 2 includes a photosensitive device in the optical coupler OC1, a photosensitive device in the photocoupler ...
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The invention discloses an isolated voltage / current detection control circuit for a high-voltage switching power supply. The isolated voltage / current detection control circuit comprises an optical input circuit, a current difference detection circuit, a current difference output circuit and a reference current input circuit, wherein the optical input circuit is connected with the current difference detection circuit; the current difference detection circuit is connected with the reference current input circuit; and the current difference output circuit is connected with the current difference detection circuit. According to the isolated voltage / current detection control circuit for the high-voltage switching power supply, the circuit is simplified and the cost is reduced since a high-voltage part for power supply and a power supply isolation part are not used and the part from a voltage setting signal to an error amplifier is also not used.
Description
technical field [0001] The invention relates to the technical field of voltage detection, in particular to an isolated voltage and current detection control circuit of a high-voltage switching power supply. Background technique [0002] High-voltage switching power supply is an important component in semiconductor manufacturing equipment, and is widely used in implanters, ALD (Atomic layer deposit, atomic layer deposition), etching machines and other equipment. In semiconductor manufacturing equipment, the high-voltage switching power supply must meet the following two characteristics: 1. It has the function of controlling the output voltage. Under the control of external signals, the power supply should be able to output any voltage from tens of volts to thousands of volts. 2. The high-voltage output terminal is electrically isolated from the power supply terminal to realize variable polarity of the power supply and ensure the safety of personnel and equipment. [0003] T...
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IPC IPC(8): H02M3/335G01R31/40G01R19/10
Inventor 赵章琰李勇滔秦威李英杰夏洋
Owner SOI MICRO CO LTD