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Optical probe

A technology of optical detector and line laser, applied in the field of optical detector, can solve the problem of inaccurate measurement of workpiece W shape

Active Publication Date: 2013-04-10
MITUTOYO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the polygon mirror 303 is a polygon mirror, the shape of the workpiece W cannot be accurately measured unless the surface of the polygon mirror 303 has uniform surface accuracy.

Method used

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no. 1 example ）

[0035] The optical probe 1A according to the first embodiment is a non-contact optical probe that scans the surface of the workpiece W and obtains the position coordinates of each point of the workpiece W. Such as figure 1 As shown in , the optical probe 1A includes an optical component 10A, an image pickup component 20A, and a controller 30A.

[0036] Such as figure 1 and figure 2 As shown in , the optical component 10A includes a laser light source 11 , a collimator lens 12 , a beam expander 13 , and a DMD (Digital Micromirror Device) 15 .

[0037] The laser light source 11 is constituted by, for example, an LD (Laser Diode), and generates and emits a laser light source. The laser light is emitted from the laser light source 11 to the collimator lens 12, and the collimator lens is located on the right side of the laser light source 11 in the horizontal direction.

[0038]The collimator lens 12 converts the light incident from the laser light source 11 into parallel li...

no. 2 example ）

[0064] The optical probe 1 according to the second embodiment is a non-contact optical probe that scans the surface of the workpiece W and obtains position coordinates of each point of the workpiece W. Such as Figure 6 As shown in , the optical probe 1 includes an optical component 10 , an image pickup component 20 and a controller 30 . The same structure of the optical probe 1 as that of the optical probe 1A of the first embodiment is denoted by the same reference numerals.

[0065] The optical component 10 includes a laser light source 11 , a collimator lens 12 , a beam expander 13 and a liquid crystal shutter (shutter) array 14 .

[0066] The laser light source 11 is constituted by, for example, an LD (Laser Diode), and generates and emits laser light. Laser light is emitted from a laser light source 11 to a collimator lens 12 , and the collimator lens 12 is arranged below the laser light source 11 .

[0067] The collimator lens 12 converts the light emitted from the la...

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PUM

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Abstract

An optical probe includes a laser light source (11) that emits laser light, a collimator lens (12) that converts the laser light into parallel light, a light shape changing section (13) that converts the parallel light into linear laser light, an irradiating section to irradiate an object with a selected part of the linear laser light, an image pickup section (20A) that picks up an image of the object based on the laser light reflected from the object, and a controlled (30A) that controls irradiation of the linear laser light. The linear laser light is composed of a plurality of parts including one end part and the other end part; and the irradiating section irradiates the object with the parts of the linear laser light sequentially from the one end part to the other end part.

Description

technical field [0001] The present invention relates to an optical probe. Background technique [0002] Non-contact optical detectors are conventionally known (see, for example, Japanese translation publication of PCT International Application No. 2009-534969). Such a non-contact optical probe irradiates an object to be measured (hereinafter referred to as a workpiece) with laser light, detects light reflected by the surface of the workpiece, and obtains position coordinates of various points of the workpiece. [0003] known as Figure 10 A line optical detector 100 is shown in , as an example of a non-contact optical detector. The line optical probe 100 uses a beam expander 103 which allows the laser light to be shaped into light L1 which is line in shape (hereinafter referred to as line laser). In the line optical probe 100 , the laser light emitted from the laser light source 101 is converted into parallel light using the collimator lens 102 . Then, the beam expander 1...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G06V10/145
CPCG01B11/2518G06V10/145
Inventor 山县正意根本贤太郎
Owner MITUTOYO CORP