Surface acoustic wave sensor for slit and manufacture method thereof
A production method, surface acoustic wave technology, applied in the direction of instruments, measuring devices, measuring force, etc., to achieve the effect of convenient production, uniform and reasonable mechanical perception, and better mechanical perception
Inactive Publication Date: 2015-01-07
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology
[0014] The purpose of the present invention is to solve the problem of monitoring the force in the slit space, and propose a surface acoustic wave sensor for the slit and a manufacturing method of the sensor
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[0032] The invention will be further elaborated below in conjunction with the accompanying drawings and specific embodiments.
[0033] like Figure 2 to Figure 7 As shown, a surface acoustic wave sensor for a slit in this embodiment includes a SAW chip 1, the SAW chip 1 includes an interdigital transducer 12 and a chip electrode 13, and the interdigital transducer 12 has an interdigital transducer Transducer electrode 121, chip electrode 13 is connected with interdigital transducer electrode 121, and described sensor comprises microstrip antenna 3, and microstrip antenna 3 has antenna electrode 31, and antenna electrode 31 and interdigital transducer electrode 121 pass key The lead wire 2 is connected. The SAW chip in this embodiment refers to a pressure sensor chip using surface acoustic wave pressure testing technology, including a quartz substrate 11 and structures such as interdigital transducers 12 and reflection grids formed on the quartz substrate, but does not include...
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The invention provides a surface acoustic wave sensor for a slit and a manufacture method of the surface acoustic wave sensor for the slit. The surface acoustic wave sensor for the slit comprises a surface acoustic wave (SAV) chip which comprises an interdigital transducer and chip electrodes. The interdigital transducer is provided with interdigital transducer electrodes and the chip electrodes are connected with the interdigital transducer electrodes. The surface acoustic wave sensor for the slit comprises microstrip antennas which are provided with antenna electrodes, and the antenna electrodes are connected with the interdigital transducer electrodes through bonding lead wires. The surface acoustic wave sensor for the slit is based on a surface acoustic wave sensor technology and the SAW chip is provided with chip pins and is connected with independent microstrip antennas through the bonding lead wires, so that the surface acoustic wave sensor is miniaturized to be suitable for being applied in a slit space which is mentioned in problems resolved by the surface acoustic wave sensor for the slit. The invention further provides a simple manufacture method of the surface acoustic wave sensor for the slit, by using the manufacture method, the surface acoustic wave sensor for the slit is convenient to manufacture.
Description
technical field [0001] The invention relates to a sensor scheme used in a special environment and a manufacturing method thereof, in particular to a surface acoustic wave sensor used in a slit and a manufacturing method thereof. Background technique [0002] For the slit environment, on the one hand, it is of special value to measure the pressure on the contact surface in real time, and the monitoring results can be used as a reference for external standard operations; on the other hand, in order to improve the reliability of the monitoring results, it is usually necessary to use an array Traditional monitoring methods usually require the use of passive wireless methods, and this passive wireless method can provide technical support for monitoring in extreme environments. like figure 1 Shown is a slit environment comprising a slit 6 and an elastic medium 7 in the middle of the slit, the elastic medium 7 typically serving to dampen vibrations. Force monitoring between slits...
Claims
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IPC IPC(8): G01L1/25
Inventor 李海宁丁杰雄褚博文崔海龙付陆元姜忠付振华邓梦张新疆谭阳
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA