Pattern generators comprising a calibration system
A technology of pattern generation and calibration system, applied in instruments, photoengraving process of pattern surface, optics, etc., can solve problems such as difficulties
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[0049] Example embodiments will now be described more fully with reference to the accompanying drawings, in which some example embodiments are shown. In the drawings, the thicknesses of layers and regions are exaggerated for clarity. Like reference numerals in the drawings indicate like elements.
[0050] Detailed exemplary embodiments are disclosed herein. However, specific structural and functional details disclosed herein are merely representative for purposes of describing example embodiments. The example embodiments may be embodied in many alternative forms and should not be construed as limited to only the example embodiments set forth herein.
[0051] It should be understood, however, that there is no intention to limit exemplary embodiments to the particular few disclosed, but on the contrary, exemplary embodiments are to cover all modifications, equivalents, and other modifications falling within the appropriate range. plans and alternatives. Like numerals refer t...
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