Screw vacuum pump adopting dry gas seal

A screw vacuum pump and dry gas sealing technology, which is applied in the direction of pumps, rotary piston pumps, gear transmissions, etc., can solve problems such as medium leakage, and achieve the effects of small installation space, easy installation and use, and compact structure

Inactive Publication Date: 2013-04-17
SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem of medium leakage in existing vacuum pumps, the object of the present invention is to provide a dry gas-sealed screw vacuum pump

Method used

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  • Screw vacuum pump adopting dry gas seal

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Embodiment Construction

[0017] The present invention will be further described below in conjunction with the accompanying drawings.

[0018] Such as figure 1 As shown, the present invention includes a cavity 1, a driving rotor shaft 10, a driven rotor shaft 11, a driving rotor 2, a driven rotor 3, a transmission device, an intermediate frame 4, a dry gas seal 5, a labyrinth seal 6, and a bearing housing 9 And the motor 8, wherein one side of the cavity 1 is connected with the intermediate frame 4, and the other side is connected with the bearing housing 9. Both the driving rotor shaft 10 and the driven rotor shaft 11 are disposed in the cavity 1 , and the driving rotor shaft 10 and the driven rotor shaft 11 are respectively provided with a driving rotor 2 and a driven rotor 3 . One end of the active rotor shaft 10 passes through the cavity 1 and the intermediate frame 4 in turn, and is connected with the motor 8 through a coupling, and the motor 8 is installed on the intermediate frame 4 . One end ...

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Abstract

The invention relates to a vacuum pump in the vacuum field, in particular to a screw vacuum pump adopting a dry gas seal. The vacuum pump comprises a cavity body, a driving rotor shaft, a driven rotor shaft, a driving rotor, a driven rotor, a transmission unit, a middle frame, the dry gas seal, a labyrinth type seal and a motor, wherein one side of the cavity body is connected with the middle frame; both the driving rotor shaft and the driven rotor shaft are arranged in the cavity body; the driving rotor and the driven rotor are arranged on the driving rotor shaft and the driven rotor shaft respectively; one end of the driving rotor shaft penetrates through the cavity body, the middle frame and the motor successively; one end of the driven rotor shaft penetrates through the middle frame to be connected with the driving rotor shaft through the transmission unit; and the driving rotor shaft and the driven rotor shaft are sleeved with the dry gas seal and the labyrinth type seal in the middle frame successively. According to the dry gas seal screw vacuum pump, a pump cavity is completely isolated from the outside through a combination mode of the dry gas seal and the labyrinth type seal, so that a medium is sealed in the pump cavity completely, and the vacuum pump is applicable to working conditions of poisonous and harmful media of petroleum and chemicals.

Description

technical field [0001] The invention relates to a vacuum pump in the vacuum field, in particular to a dry gas sealed screw vacuum pump. Background technique [0002] Due to its superior performance, screw vacuum pumps are widely used in microelectronics, pharmaceuticals, precision processing, papermaking, packaging and other industries, especially in semiconductor processing production lines, which have many unique challenges. [0003] In recent years, with the application of screw vacuum pumps in the petroleum and chemical industries, some problems have been exposed. The traditional shaft seal cannot guarantee the complete sealing of the conveying medium, and there must be a certain amount of medium leakage, which is harmful to the transmission of toxic and harmful medium. There will be potential safety hazards, and the life of the operator will be endangered when the situation is serious. Based on the above circumstances, a relatively zero-leakage screw vacuum pump is req...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04C25/02F04C18/16F16H1/04
Inventor 张振厚王光玉刘志东
Owner SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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