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Wire saw

A wire saw and wire technology, which is applied in sawing machine devices, metal sawing equipment, manufacturing tools, etc., can solve the problems such as the increase of the size of the wire saw, the increase of the wire breakage rate, and the easy torsion of the wire, so as to suppress the Effects of torsion, reduction of inertial problems, simplified structure

Inactive Publication Date: 2015-03-25
KOMATSU NTC LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that not only the number of parts is large and the structure is complicated, but also a space for arranging a tension adjustment device and a plurality of guide rollers is required between the processing roller and the two bobbins, resulting in an increase in the size of the entire wire saw. change
In addition, since the wire runs between the processing roller and the two bobbins while changing the direction of travel by a plurality of guide rollers, there are problems that the wire is easily torsion, causing problems with inertia, and the wire breakage rate becomes low. high

Method used

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Embodiment Construction

[0018] Next, one Embodiment of the wire saw which actualized this invention is demonstrated based on drawing.

[0019] Such as figure 1 and figure 2 As shown, in the wire saw of this embodiment, a plurality of (a pair in this embodiment) processing rollers 11A, 11B are arranged at intervals in a horizontal plane on a frame not shown in the figure. The use rollers 11A and 11B are supported so as to be rotatable about rotation axes extending parallel to each other. On the outer peripheral surface of each processing roller 11A, 11B, a plurality of annular grooves 11a are formed at predetermined pitches, and the wire rod 12 is disposed in the annular groove 11a of the processing rollers 11A, 11B. The wire 12 is suspended between the rollers 11A and 11B. Below the position on both sides sandwiching the processing rollers 11A, 11B, on the frame, a pair of bobbins 13A, 13B are supported by support devices 14A, 14B so as to be parallel to the rotation axes of the processing roller...

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Abstract

The wire saw is provided with: multiple processing rollers (11A, 11B) across which the wire (12) for processing the workpiece is suspended; supply side bobbins (13A, 13B) that rotate to supply the wire (12) between the processing rollers (11A, 11B); and winding side bobbins (13B, 13A) that rotate to wind the wire (12) from between the processing rollers (11A, 11B). The wire saw is equipped with: a pair of traversing mechanisms (16) that cause the two bobbins (13A, 13B) to traverse in the directions of the respective rotational axes; a pair of sensors (18) that respectively detect the tension on the wire (12) between a processing roller (11A, 11B) and a bobbin (13A, 13B); and a pair of tension-adjusting mechanisms (17) that respectively move the bobbins (13A, 13B) so as to adjust the tension of the wire (12) on the basis of the sensor (18) detection results.

Description

technical field [0001] The present invention relates to a wire saw for cutting workpieces made of brittle materials such as semiconductor materials, magnetic materials, and ceramics with a wire. Background technique [0002] Conventionally, as such a wire saw, for example, a configuration disclosed in Patent Document 1 has been proposed. In this conventional configuration, the wire saw includes: a plurality of processing rollers on which the wire is suspended; a supply side reel that rotates to supply the wire between the processing rollers; and a winding side reel that performs Rotate to wind up the wire between the processing rollers. Displacement mechanisms for displacing these reels in the direction of the rotation axis are provided on the supply-side reel and the take-up-side reel. Between the processing roller, the supply-side reel, and the take-up-side reel, there are respectively provided a floating roller type tension adjusting device for adjusting the tension of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B27/06B28D5/04H01L21/304
CPCB24B27/0633B23D57/0061B28D5/045B24B27/06B26D1/547B28D1/08B28D5/00
Inventor 阿部克彦长井俊树
Owner KOMATSU NTC LTD