Scrubbing tower used for acidic and alkaline exhaust gas of semiconductor plants

Abstract

The invention discloses a scrubbing tower used for acidic and alkaline exhaust gas of semiconductor plants. The scrubbing tower comprises a circulation detergent box. A porous separation plate is arranged at the middle of the circulation detergent box. The part of the circulation detergent box below the separation plate is used for collecting a detergent. A filling material used for increasing the contact area between the acidic and alkaline exhaust gas and the detergent is arranged on the separation plate. The scrubbing tower also comprises a circulation pump and a circulation pipeline. The circulation pump is connected with the circulation detergent box through the circulation pipeline, and is used for driving the circulation flow of the detergent. The scrubbing tower also comprises a liquidometer which is arranged on the lower part of the circulation detergent box and is connected with the circulation detergent box through a connection device. A filtering device is arranged on the connection device. With the scrubbing tower provided by the invention, impurities and scraps of filling materials can be effectively prevented from entering the liquidometer and damaging the liquidometer; and scrubbing tower scrubbing effect is prevented from being affected by excessively low liquid level in the scrubbing tower. The scrubbing tower has a simple structure, and provides an excellent processing effect upon semiconductor plant acidic and alkaline exhaust gases.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a washing tower for acid-base exhaust of semiconductor workshops. Background technique [0002] The gas discharged from the process exhaust system of clean rooms such as semiconductor factories is usually acidic and alkaline. If it is directly discharged into the environment, it will cause pollution. Therefore, a scrubber will be used to treat the acidic and alkaline exhaust. When the acid-base exhaust gas passes through the scrubber, it will chemically react with the detergent in it to remove the contained acid-base components. [0003] The replenishment and drainage of the detergent liquid level in the washing tower are all controlled by the liquid level gauge. The washing towers of most factories are installed outdoors. After long-term operation, there will be a lot of sundries in the detergent in the washing towers. In addition, in order to increase the treatment efficiency of...

AI Technical Summary

Problems solved by technology

The washing towers of most factories are installed outdoors. After long-term operation, there will be a lot of sundries in the detergent in the washing towers

In addition, in order to increase the processing efficiency of the scrubber, the scrubber is usually equipped with fillers, which will become brittle and broken after long-term work

If the above-mentioned sundries and broken fillers enter the liquid level gauge and are not disposed of in time, it may cause the floating ball of the liquid level gauge to get stuck, which will cause the liquid level gauge to fail to correctly reflect the liquid level of the detergent in the washing tower.

The consequence is that if the liquid level is too low and the water cannot be replenished in time, it will seriously affect the washing effect of the scrubber, which in turn will have an adverse impact on the environment

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