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Non-slide type gate valve

一种无滑动、闸阀的技术，应用在滑动阀、阀细节、阀装置等方向，能够解决构造复杂、操作复杂、零件个数变多等问题，达到构造简单、零件个数少、防止磨损粉末的产生的效果

Active Publication Date: 2013-05-08
SMC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, in the gate valve disclosed in Patent Document 1, a mechanism for vertically moving the valve plate with respect to the valve seat surface is configured by combining a plurality of connecting rods, cam followers, and guide grooves, so there are individual components. Difficulties of changing numbers, complex structure, and complicated operation

Method used

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  • Non-slide type gate valve
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  • Non-slide type gate valve

Examples

Experimental program
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Embodiment Construction

[0062] Figure 1~Figure 8 The first embodiment of the no-slide gate valve of the present invention is shown. The gate valve 1A is installed in a vacuum chamber in a semiconductor processing device to open and close an opening communicating with the vacuum chamber, and has: a valve box 2 having the opening 3; a valve plate 5 accommodated in the valve box 2; The valve seal 6 installed on the valve plate 5; the valve shaft 7 connected with the valve plate 5; the cylinder 8 connecting the driving rod 9 on the valve shaft 7, and the valve shaft is driven by the cylinder 8 7 moves, thereby, make described valve plate 5 be in following position: make this opening 3 become the fully open position (refer to figure 1 left half and Figure 4 ); the relative position opposite to the opening 3 but not closed (refer to figure 1 right half and Figure 5 ); press the valve seal 6 against the valve seat surface 10 around the opening 3 and close the closed position of the opening 3 (refer t...

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PUM

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Abstract

A parallel movement mechanism including guide grooves and guide rollers and a vertical movement mechanism including cam grooves and cam rollers are interposed between a drive rod and a valve shaft of an air cylinder, and a valve seal of a valve plate is moved vertically toward and away from a valve seat surface to open and close the opening by moving the valve shaft in parallel to the valve seat surface by the parallel movement mechanism and moving the same vertically with respect to the valve seat surface by the vertical movement mechanism.

Description

technical field [0001] The present invention relates to a gate valve which is mounted on a vacuum chamber in a semiconductor processing apparatus and used for opening and closing an opening communicating with the vacuum chamber, and more specifically relates to a non-slip gate valve capable of opening and closing the opening without sliding. type gate valve. Background technique [0002] In a semiconductor processing apparatus, a gate valve is used to open and close an opening communicating with a vacuum chamber. The gate valve generally has a valve plate that opens and closes an opening, a valve shaft connected to the valve plate, and a cylinder connected to the valve shaft. The valve shaft is operated by the cylinder, thereby making the valve seal of the valve plate The opening is opened and closed with close separation from the valve seat surface around the opening. [0003] The gate valve has the following methods: the valve plate is opened and closed by tilting the va...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K3/02F16K31/524
CPCF16K3/16F16K3/184F16K3/3165H01L21/67F16K51/02F16K3/18
Inventor 石垣恒雄下田洋己小川浩司
Owner SMC CORP