Three-dimensional microcomputer electric transducer

Abstract

The invention provides a three-dimensional microcomputer electric transducer. The three-dimensional microcomputer electric transducer comprises a plurality of movable first electrodes, a plurality of movable second electrodes, a plurality of fixed third electrodes, and a plurality of fixed fourth electrodes, wherein the first electrodes and the adjacent third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and the adjacent fourth electrodes form at least one third capacitor. The capacitance of the first capacitor changes displacement of a mass block, the displacement is reflected in a first axis direction, the capacitance of the second capacitor changes displacement of the mass block, the displacement is reflected in a second axis direction, and the capacitance of the third capacitor changes displacement of the mass block, and the displacement is reflected in a third axis direction. The first axis, the second axis and the third axis define a three-dimensional coordinate system.

Description

technical field [0001] The invention relates to a three-axis micro-electromechanical sensor, in particular to a micro-electromechanical sensor that integrates in-plane sensing electrodes and out-plane sensing electrodes in a vertical direction. Background technique [0002] MEMS components have various applications, one of which is to make capacitive sensors such as accelerometers, microphones, etc. There are two types of capacitive sensors in the prior art: in-plane sensors and out-of-plane sensors. The former senses capacitance changes in the horizontal direction (x-y plane), and the latter senses Capacitance change in the vertical direction (z-axis). For prior art on in-plane sensors and their manufacturing methods, for example, refer to US Patent Nos. 5,326,726, 5,847,280, 5,880,369, 6,877,374, 6,892,576, and 2007 / 0180912. Regarding the prior art of out-of-plane sensors and their manufacturing methods, for example, refer to US Patent Nos. 6,402,968, 6,792,804, 6,845,67...

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Problems solved by technology

However, these patent documents are not yet capable of simultaneously sensing capacitance changes in three axes.

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