Three-dimensional microcomputer electric transducer
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A technology of micro-electromechanical sensors and three-dimensional coordinates, which is applied to piezoelectric devices/electrostrictive devices, circuits, piezoelectric/electrostrictive/magnetostrictive devices, etc., and can solve problems such as inability to simultaneously sense sensors
Inactive Publication Date: 2013-06-05
PIXART IMAGING INC
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[0065] figure 1 A top view of a three-axis MEMS sensor according to an embodiment of the present invention is shown. The three-axis MEMS sensor 10 includes a substrate 11 (see Figure 2A ), a fixed frame portion 12, a mass block 13 and a plurality of spring members 14. The fixed frame portion 12 is fixed on the base plate 11 and surrounds the proof mass 13 , but is not limited to the enclosed wall shape in the drawing, and may also be multiple columns or multiple walls. A plurality of springs 14 connect the outer fixed frame portion 12 and the central mass block 13 , and enable the mass block 13 to move in-plane and out-of-plane relative to the base plate 11 through its elasticity. Here, the co-planar motion refers to the motion on the XY plane (parallel to the substrate 11 ), and the out-of-plane motion refers to the motion component on the Z axis.
[0066] Figure 2A for along figure 1 The cross-sectional view of the I-I section line, and Figure 2B for along figure 1...
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Abstract
The invention provides a three-dimensional microcomputer electric transducer. The three-dimensional microcomputer electric transducer comprises a plurality of movable first electrodes, a plurality of movable second electrodes, a plurality of fixed third electrodes, and a plurality of fixed fourth electrodes, wherein the first electrodes and the adjacent third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and the adjacent fourth electrodes form at least one third capacitor. The capacitance of the first capacitor changes displacement of a mass block, the displacement is reflected in a first axis direction, the capacitance of the second capacitor changes displacement of the mass block, the displacement is reflected in a second axis direction, and the capacitance of the third capacitor changes displacement of the mass block, and the displacement is reflected in a third axis direction. The first axis, the second axis and the third axis define a three-dimensional coordinate system.
Description
technical field [0001] The invention relates to a three-axis micro-electromechanical sensor, in particular to a micro-electromechanical sensor that integrates in-plane sensing electrodes and out-plane sensing electrodes in a vertical direction. Background technique [0002] MEMS components have various applications, one of which is to make capacitive sensors such as accelerometers, microphones, etc. There are two types of capacitive sensors in the prior art: in-plane sensors and out-of-plane sensors. The former senses capacitance changes in the horizontal direction (x-y plane), and the latter senses Capacitance change in the vertical direction (z-axis). For prior art on in-plane sensors and their manufacturing methods, for example, refer to US Patent Nos. 5,326,726, 5,847,280, 5,880,369, 6,877,374, 6,892,576, and 2007 / 0180912. Regarding the prior art of out-of-plane sensors and their manufacturing methods, for example, refer to US Patent Nos. 6,402,968, 6,792,804, 6,845,67...
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