Glass-based biomimetic micro-nano channel and manufacturing method thereof

Abstract

The invention discloses a glass-based biomimetic micro-nano channel and a manufacturing method thereof. The micro-nano channel is made of a glass material with uniform components and excellent optical and mechanical properties, the cross section of the micro-nano channel is a regular circle, functional units with various sizes are arranged on the micro-nano channel and in natural transition, and sizes of the functional units change continuously. According to the method, a softening and forming characteristic of glass is used, a millimeter grade glass capillary tube is taken as a blank, and the glass-based biomimetic micro-channel with different functional units is processed through steps such as stretching thinning, softening blowing, softening contraction and the like. The glass-based biomimetic micro-nano channel is simple and reliable in structure and good in flow property, can effectively improve the system performance of a micro-nano fluid; and the manufacturing method has the advantages that the process is reliable, the required device is simple, the operation is convenient, the cost is low and the like, and the manufacturing accuracy is high.

Description

technical field [0001] The invention relates to the technical field of micro-nano processing and microfluidic devices, and relates to a bionic micro-nano channel based on a glass softening molding process and a manufacturing method, and is especially suitable for microfluidic systems such as microfluidic chips, micromixers, and microfluidic detection. aisle. Background technique [0002] In recent years, microfluidic systems have been widely used in the fields of biology, medical treatment, microchemical industry, and environmental testing, and more and more stringent requirements have been put forward for their performance, precision, and cost. A microfluidic system is usually composed of micro-drive sources, micro-fluidic circuits (including micro-channels and inlet and outlet interfaces), micro-valves, liquid reservoirs, mixing (reaction) chambers and other units. Performing fluid transport, manipulation, processing, and more is a core element of microfluidic sys...

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Problems solved by technology

[0003] At present, microchannel processing technology can be divided into three types: the first type is micromachining technology based on etching, photolithography, corrosion and other technologies ([1]Verpoorte E, De Rooij NF. Microfluidics meets MEMS[J].Proceedings of the IEEE, 2003, 91(6): 930-953. [2] Lin Jinming, Li Haifang. Preparation method of polymer microfluidic chip [P]. Chinese patent: ZL200410042716.4, 2009-07-01. ), suitable for micro-channel processing of materials such as silicon and its oxides, glass, polymers, etc., up to micron or sub-micron level, but the cross-sectional shape of the micro-channel includes three types: triangle, rectangle and semicircle; the second type It is a thermal embossing and thermal bonding technology for high molecular polymers (Li Jingmin. Dissertation: Research on the fabrication method and related theory of thermoplastic polymer three-dimensional structure microfluidic devices [D]. Dalian: Dalian University of Technology, 2012 (3 ).), the cross-sectional shape of the processed microchannel is similar to that of the micromachining process, the unit cost is low, but the dimensional accuracy is low, and deformation or stress concentration will occur during cooling and demolding; the third type is based on glass thermal deformation Capillary drawing process (Zhang Xiaole, Hou Liya, Zhang Weiyi. Design and experiment of thermorheological drawing instrument for glass three-way microfluidic pipe [J]. Optical Precision Engineering, 2008, 16 (9): 1706-1711.), available Fabrication of circular cross-section micropipes with a single size, the size of which reaches sub-micron level, but lacks functional units such as liquid storage tanks and mixing (reaction) chambers, and the system packaging is difficult

In general, the existing microchannel processing technology includes three processes of molding, bonding and packaging. The axis can only be distributed in a straight line or a broken line in the plane. The cross-sectional shape is mostly triangular, rectangular or semicircular, and the rigid surface is rough and uneven. , resulting in a large flow resistance, which is an important factor affecting the performance of the microfluidic system

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