Microscope machine platform structure
A technology for microscopes and worktables, which is applied in optics, instruments, projection devices, etc., can solve problems such as wafer collisions, microscope defects, and damaged wafers, and achieve cost savings, simple structure, and avoid potential safety hazards.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0027] See figure 1 As shown, a microscope stage structure in the prior art is used to inspect wafers. The microscope is equipped with a manipulator for grabbing wafers. Several wafers are contained in a wafer box. The wafer box is fixed on the microscope table structure. The microscope platform structure includes a working table 1'that can move up and down and a driving motor that drives the working table 1'to move up and down. The work table 1'is provided with a card slot 3'for positioning the wafer box and a sensor 4'for sensing whether the wafer box is installed on the work table 1'.
[0028] The working principle of the microscope platform structure in the prior art is: during normal testing, when the wafer box with the wafer installed is correctly clamped into the card slot 3', the sensor 4'senses that the wafer box has been correctly installed On the work surface 1', an induction signal will be sent to indicate that the equipment can operate normally. At this time, the ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2023 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap