Objective table location method

A positioning method and stage technology, applied in the direction of measuring devices, instruments, measuring instrument components, etc., can solve the problem that the stage is not easy to be positioned accurately, and achieve the effect of not being easy to move and high stability

Inactive Publication Date: 2013-07-17
KUN SHAN POWER STENCIL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The technical problem to be solved by the present invention is the problem that the object stage is not easy to be positioned

Method used

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  • Objective table location method
  • Objective table location method
  • Objective table location method

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0043] [Example 1]

[0044] A stage with electric control position, such as figure 1 As shown, it includes a support column 11, a pin 12, a plunger 13, a fixed base plate 14, and a motor 15 that can rotate the pin 12 and the support column 11. In this embodiment, there are three supporting pillars 11 and they are not on the same plane. Since the three points are fully positioned and satisfy the geometric three-point fixed plane, the three upper ends of the supporting pillars can determine the loaded object on a plane.

[0045] Pin 12 is an eccentric pin, such as figure 2 As shown, it consists of a part contacting the carried object 21, a part 22 fixed on the substrate 14 and a mechanism 23 part whose lower end is matched with the electrode. The position of the carried object placed on the support column can be adjusted by the rotation of the pin.

[0046] The part of the support column 11 fixed on the base plate 14 and the lower end has a mechanism part matched with the motor. The r...

Example Embodiment

[0060] [Example 2]

[0061] An electronically controlled position stage, which includes the stage and three eccentric pins that control the position of the loaded object. The eccentric pins have an adjustment function and can accurately determine the loaded object on a certain plane. The role of location. The eccentric pin with adjustment function is an eccentric pin, which is composed of two cylinders with different shafts. The surfaces of the two cylinders have a threaded structure. The eccentric pin is fixed on the stage through this structure for preventing loosening The nut fixes the adjusted eccentric pin on the stage, and there is an adjustment mechanism on the eccentric pin. In this embodiment, the adjustment mechanism is a circular hole, which can be rotated and adjusted by inserting a bar into it.

[0062] The stage in this embodiment has three hard-point support columns, which can fix the loaded object on a certain plane through the three support points, and the height ...

Example Embodiment

[0074] [Example 3]

[0075] An electronically controlled position stage is used for placing objects with regular appearance and high position accuracy requirements. The support frame includes a support column, an eccentric pin, and a base for fixing the support column and the eccentric pin. The support columns are three hard support columns whose positions are not in a straight line, which are made of stainless steel and have a threaded structure that can rotate the support column at the contact position of the support column and the base, that is, it can be adjusted by the threaded structure The height of the support point of each support column. Three support columns can fix the supported table on a certain plane. In this embodiment, three eccentric pins are fixed on the base, which are made of hard wear-resistant materials. The position of the eccentric pins is on the periphery of the triangle formed by the support column and is not on a straight line. The fixed position is c...

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PUM

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Abstract

The invention relates to a motor-driven objective table location method which mainly solves the problem in the prior art that an object table cannot performing location accurately. The object table location method includes the following steps: a) fixing hard support columns and soft support columns of the object table on a base table; b) fixing eccentric pins on the base table with the lower end of each eccentric pin connected with a rotating mechanism of a motor; c) vertically moving screw structures of the hard support columns along the base table to enable upper end points of the hard support columns to be located on the same horizontal plane, placing a loaded object on a support, fixing column plugs on the base table and clamping the loaded object between the eccentric pins and the column plugs; d) adjusting a motor under the soft support columns to rotate to enable the upper end points of the hard support columns to cling to the loaded object; e) controlling the eccentric pins to enable the loaded object to move horizontally relative to the base table; f) adjusting the motor under the hard support columns to rotate to enable the loaded object to move vertically relative to the base table; and g) adjusting other motors under the eccentric pins to enable the eccentric pins and the column plugs to fix the loaded object on the object table. By means of the technical scheme, the method well solves the problem and can be used for location operation of the object table in precision operation.

Description

technical field [0001] The invention relates to a method for positioning an object stage. Background technique [0002] With the development of society, various industries have higher and higher requirements for the placement environment and bearing platform of the hardware facilities involved in the industry, especially for the placement of some precision instruments. For example, in the operation table involving the work of optical components, it is often required that the supporting platform has sufficient stability. [0003] Chinese patent CN101738127A discloses a heat-insulating support device, which includes a cold platform with multiple mounting holes and a support rod for supporting the cold platform, and the support rod includes an upper support rod and a lower support rod. Cooperate with the mounting holes in a point contact or line contact manner respectively, but the support frame of the invention has four support columns. [0004] Chinese patent CN2574502 disc...

Claims

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Application Information

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IPC IPC(8): G01D11/00
Inventor 魏志凌高小平
Owner KUN SHAN POWER STENCIL
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