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Objective table location method

A positioning method and stage technology, applied in the direction of measuring devices, instruments, measuring instrument components, etc., can solve the problem that the stage is not easy to be positioned accurately, and achieve the effect of not being easy to move and high stability

Inactive Publication Date: 2013-07-17
KUN SHAN POWER STENCIL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The technical problem to be solved by the present invention is the problem that the object stage is not easy to be positioned accurately in the prior art, and a new object stage positioning method is provided, which has the advantage of accurate positioning

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0044] A stage with electrically controlled positions, such as figure 1 As shown, it includes a support column 11 , a pin 12 , a plunger 13 , a fixed base plate 14 and a motor 15 capable of rotating the pin 12 and the support column 11 . In the present embodiment, there are three support columns 11, and they are not on the same plane. Since the three points are fully positioned, the geometric three-point determination plane is satisfied, and the three points at the upper end of the support columns can determine the object to be carried on a plane.

[0045] Pin 12 is an eccentric pin, such as figure 2 As shown, it consists of a part 21 that contacts the object to be carried, a part 22 fixed on the substrate 14, and a mechanism 23 whose lower end matches the electrode. The position of the object to be carried on the support column can be adjusted by the rotation of the pin.

[0046] The part of the support column 11 fixed on the base plate 14 and the lower end have a mechanism...

Embodiment 2

[0061] An electronically controlled object stage, which includes an object stage and three eccentric pins that control the position of the loaded object. The eccentric pin has an adjustment function and can precisely position the loaded object on a certain plane. role of location. The eccentric pin with adjustment function is an eccentric pin, which is composed of two cylinders with different axes. The surface of the two cylinders has a thread structure, and the eccentric pin is fixed on the stage through this structure, which is used for loosening The nut fixes the adjusted eccentric pin on the stage, and the eccentric pin is provided with an adjustment mechanism. In this embodiment, the adjustment mechanism is a circular hole, which can be rotated and adjusted by inserting a bar rod.

[0062] The stage in this embodiment has three hard-point support columns, which can fix the object to be carried on a certain plane through three support points, and the height of the hard-poi...

Embodiment 3

[0075] An electric control position stage is used to place objects with regular shape and high position accuracy requirements. The support frame includes support columns, eccentric pins and abutment for fixing the support columns and eccentric pins. The support columns are three hard support columns whose positions are not on a straight line, which are made of stainless steel, and have a threaded structure that can rotate the support column at the position where the support column contacts the abutment, that is, it can be adjusted through the thread structure The height of each support column support point. 3 support columns can fix the supported table on a certain plane. In this embodiment, three eccentric pins are fixed on the abutment, which are made of hard and wear-resistant materials. The position of the eccentric pins is on the periphery of the triangle formed by the support columns, and they are not on a straight line. Their fixed positions are corresponding to the sta...

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Abstract

The invention relates to a motor-driven objective table location method which mainly solves the problem in the prior art that an object table cannot performing location accurately. The object table location method includes the following steps: a) fixing hard support columns and soft support columns of the object table on a base table; b) fixing eccentric pins on the base table with the lower end of each eccentric pin connected with a rotating mechanism of a motor; c) vertically moving screw structures of the hard support columns along the base table to enable upper end points of the hard support columns to be located on the same horizontal plane, placing a loaded object on a support, fixing column plugs on the base table and clamping the loaded object between the eccentric pins and the column plugs; d) adjusting a motor under the soft support columns to rotate to enable the upper end points of the hard support columns to cling to the loaded object; e) controlling the eccentric pins to enable the loaded object to move horizontally relative to the base table; f) adjusting the motor under the hard support columns to rotate to enable the loaded object to move vertically relative to the base table; and g) adjusting other motors under the eccentric pins to enable the eccentric pins and the column plugs to fix the loaded object on the object table. By means of the technical scheme, the method well solves the problem and can be used for location operation of the object table in precision operation.

Description

technical field [0001] The invention relates to a method for positioning an object stage. Background technique [0002] With the development of society, various industries have higher and higher requirements for the placement environment and bearing platform of the hardware facilities involved in the industry, especially for the placement of some precision instruments. For example, in the operation table involving the work of optical components, it is often required that the supporting platform has sufficient stability. [0003] Chinese patent CN101738127A discloses a heat-insulating support device, which includes a cold platform with multiple mounting holes and a support rod for supporting the cold platform, and the support rod includes an upper support rod and a lower support rod. Cooperate with the mounting holes in a point contact or line contact manner respectively, but the support frame of the invention has four support columns. [0004] Chinese patent CN2574502 disc...

Claims

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Application Information

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IPC IPC(8): G01D11/00
Inventor 魏志凌高小平
Owner KUN SHAN POWER STENCIL
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