A silicon wafer buffer loading device
A technology for loading devices and silicon wafers, applied in measuring devices, optical devices, instruments, etc., can solve the problems that absolute matching is difficult to achieve, increase the cost of optical measurement equipment, etc., and achieve the effect of stable loading and simple loading process
Inactive Publication Date: 2015-10-28
BEI OPTICS TECHNOLOGY COMPANY LIMITED +1
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However, generally speaking, the manipulator and the wafer sample stage are usually produced by different manufacturers, and the absolute matching between the two is often difficult to achieve, which requires a separate custom-made matching silicon wafer sample stage from the manufacturer, which will inevitably increase the optical measurement equipment. the cost of
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[0019] In order to deeply understand the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0020] See attached Figure 11 , the silicon wafer buffer loading device provided by the present invention comprises a silicon wafer sample stage 2 and a suction cup 1, the suction cup 1 cooperates with the silicon wafer sample stage 2, and the silicon wafer sample stage 2 has a base 3, see the attached image 3 , also includes a buffer mechanism, the buffer mechanism is connected to the base 3 . The buffer mechanism includes a contact platform 4 and a lifting mechanism 5 , the contact platform 4 is fixedly connected to the lifting mechanism 5 , and the contact platform 4 is driven up and down by the lifting mechanism 5 .
[0021] Wherein, the buffer mechanism can be connected to the base 3 through the lifting mechanism 5 .
[0022] See attached Figure 4 , the buffer mechanism may also ...
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The invention discloses a silicon wafer buffer loading device, and belongs to the technical field of silicon wafer sample optical measurement. The device comprises a silicon wafer sample platform and a sucker. The sucker is matched with the silicon wafer sample platform. The silicon wafer sample platform is provided with a base and further comprises a buffer mechanism, wherein the buffer mechanism is connected with the base. The buffer mechanism comprises a contact platform and a lifting mechanism, the contact platform is fixed connected with the lifting mechanism, and the contact platform ascends and descends under drive of the lifting mechanism. When a silicon wafer sample is loaded through the device, a manipulator and the silicon wafer sample platform can be loaded at will, and meanwhile the loading process is simple and stable during loading.
Description
technical field [0001] The invention relates to the technical field of optical measurement of silicon wafer samples, in particular to a silicon wafer loading device used for measuring optical signals reflected by silicon wafer samples in the semiconductor industry. Background technique [0002] Accurately measuring surface information such as critical dimensions, spatial morphology and material properties of a three-dimensional structure formed by a single-layer or multi-layer thin film on a silicon wafer sample plays a very important role in the semiconductor industry. Usually, optical measurement technology is used to obtain the surface information of the silicon wafer sample by measuring the light signal reflected by the silicon wafer sample. [0003] In the prior art, during the use of an optical measuring device for measuring surface information of a silicon wafer sample, the silicon wafer sample is loaded onto the suction cup of the silicon wafer sample stage by a mani...
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IPC IPC(8): G01B11/30G01B11/24G01N21/47
Inventor 吴文镜李国光赵江艳
Owner BEI OPTICS TECHNOLOGY COMPANY LIMITED