Noise power generating device based on micro-perforated panel structure

Abstract

The invention discloses a noise power generating device based on a micro-perforated panel structure and relates to the technology of reducing noise and the technology of energy harvesting. The noise power generating device based on the micro-perforated panel structure comprises a micro-perforated silicon wafer, an electricity-conducting support, sensitive piezoelectric films, extraction electrodes and a film supporting body. The micro-perforated silicon wafer is of a sound adsorbing noise lowering structure. The electricity conducting support can not only form a cavity needed by a resonance sound absorption structure but also serve as a structure being connected with electrodes on the piezoelectric films. The lower portion of the silicon wafer is provided with the piezoelectric films. On the one hand, the silicon wafer closes a resonant cavity, and on the other hand, the suspended piezoelectric films above the silicon wafer can continuously vibrate under the action of sound waves and generate polarization charges. In addition, the polarization charges can be collected through an upper layer of film electrodes and a lower layer of film electrodes. According to the noise power generating device based on the micro-perforated panel structure, micro-mechanic electronic process technology is applied, and the silicon wafer is made into the micro-perforated panel structure so as to lower noise. In addition, acoustic energy contained by the noise serves as an energy source of energy harvesting devices, the acoustic energy is converted into electricity, and therefore noise lowering and power generation are mutually promoted. The noise power generating device based on the micro-perforated panel structure has the advantages of being simple in structure and capable of being prepared in batch.

Description

technical field [0001] The invention relates to the fields of noise reduction technology and energy collection technology, and is a noise power generation device based on a micro-perforated plate structure. Background technique [0002] Noise has a great impact on people's normal work and rest, the service life of machinery and equipment, and the survivability of military equipment. Commonly used noise reduction methods mainly include sound-absorbing material method and sound-absorbing structure method. The sound-absorbing material method usually refers to the method of using porous sound-absorbing materials to reduce noise, mainly including organic fibers, inorganic fibers, metal fibers, foam metals, foam plastics, foam glass, foam polymers, etc.; the sound-absorbing structure method mainly uses Helmholtz resonators and resonant sound-absorbing structures such as micro-orifice plates developed on the basis of them can absorb sound and reduce noise. The absorption effect o...

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Problems solved by technology

At present, vibration energy harvesting devices mainly use special structures such as cantilever beams, thin films, electrostatics, and nanowire arrays. Ho

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