A frequency-tunable micro-scanning mirror and its application in fluorescence imaging
A mirror and micro-scanning technology, applied in the field of fluorescence imaging systems, can solve the problems of increased driving force, inability to precisely control the size of the field of view, and inability to synchronize scanning frequency, amplitude and phase adjustment, etc.
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[0022] The present invention is a micro-scan mirror with adjustable frequency, such as figure 1 As shown, the reflector 1 is included, and the reflector 1 includes an inner shaft 2 for turning the reflector 1 up and down and an outer shaft 3 for turning the reflector 1 left and right. The reflector 1 is also provided with a first shaft for driving the inner shaft 2 to rotate. A group of comb-shaped driving devices 4 and a second group of comb-shaped driving devices 5 for driving the rotation of the outer shaft 3, such as figure 2 As shown, the first group of comb-shaped driving devices 4 includes a plurality of fixed stator combs 6 around the inner shaft 2 and a plurality of rotor combs 7 that can rotate at a certain angle around the inner shaft 2, and the second group of comb-shaped driving devices 5 includes a plurality of fixed stator combs 6 around the outer shaft 3 and a plurality of rotor combs 7 rotating at a certain angle around the outer shaft 3. The stator combs 6 a...
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