Apparatus for etching substrates

Abstract

PROBLEM TO BE SOLVED: To provide a substrate etching apparatus including spraying means for spraying an etchant to a plurality of substrates on a cassette from above, the means being easy in maintenance.SOLUTION: A substrate etching apparatus includes: an etching chamber 30; a cassette 20 in which a plurality of substrates 1 are vertically placed, the cassette arranged in the etching chamber 30; and spray means 10 disposed above the cassette 20, for spraying an etchant. The spray means 10 includes: a frame supply tube 13 in which four frame tubes 13 horizontally arranged in a quadrangular shape, and to which the etchant is supplied from the outside; a support bar 31 allowing frame tubes 13b facing each other to safely arrive at an inner wall of the etching chamber 30; and a plurality of spray modules 11 each having both ends communicatively coupled with the frame tubes 13 facing each other, to which the etchant is supplied from the frame tubes 13, for spraying the etchant to the substrates 1.

Description

[0001] Cross References to Related Applications [0002] This application claims priority and rights to Korean Patent Application No. 10-2012-0011490 filed with the Korean Intellectual Property Office on February 3, 2012, the entire contents of which are hereby incorporated by reference. into this article. technical field [0003] The present invention relates to an apparatus for etching a substrate, and more particularly, to an apparatus for etching a substrate, wherein the etchant is sprayed downward from the top onto a plurality of vertically loaded substrates so that the etchant is sprayed along the substrates. The surface of the bottom flows to make the thickness of the substrate thinner; the ejection device for ejecting the etchant to a plurality of vertically loaded substrates is arranged to be taken out from the inside of the etching chamber to facilitate maintenance; The coupling position of the nozzles of each injection module has been improved to prevent the accumu...

AI Technical Summary

Problems solved by technology

In the foregoing structure, the ejection device 10 is fixed inside the etching chamber, and thus there is a problem that a worker may inevitably enter the etching chamber in order to maintain or clean the ejection device 10, or even if she / he does not enter the etching chamber, he / she must Go through a significantly troublesome and complicated process

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