An experimental control system and method for auxiliary process flow

A technology of process flow and control method, applied in the field of experimental control system for auxiliary process flow, can solve problems such as affecting process controllability, increasing equipment switching frequency, etc., to achieve the effect of increasing efficiency and reducing switching frequency
CN103257635BActive Publication Date: 2016-01-20SHANGHAI HUALI MICROELECTRONICS CORP
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI HUALI MICROELECTRONICS CORP
Publication Date
2016-01-20

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Abstract

The invention provides an experimental control system and method for assisting the technological process. The method includes the following steps of presetting all experimental conditions in one time of experimental design, defining a beginning site and an ending site of a main process, and executing the main process of an experiment, utilizing virtual sites to conduct connection in a middle process of the main process according to the preset experimental conditions, conducting repeated batch-wise experiments on each preset experimental condition, and sequentially conducting combining on results of the repeated batch-wise experiments. Through the experimental control system and method for assisting the technological process, all the batch-wise experiments can be conducted in one experiment, switch frequency of on-line equipment is reduced, controllability of the on-line process is not influenced, and meanwhile efficiency of the experiment is greatly increased.
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Description

technical field

[0001] The present invention relates to an experiment control system and method, in particular to an experiment control system and method for assisting process flow. Background technique

[0002] In the process of process production, it is often necessary to continuously change the conditions for adjusting the process flow to verify the reliability of the process. At present, if experiments with different conditions are required for the process flow, it is often only possible to conduct experiments in batches once in one stage of the main process. If multiple experiments are required, multiple experimental designs must be set up. After the main process, start the batch experiment again, which will have many repeated actions, which will greatly increase the switching frequency of the equipment and affect the process controllability on the line. Contents of the invention

[0003] In order to overcome the above-mentioned deficiencies in the prior art, the pur...

Claims

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