Middle type water-cooling heat dissipation mechanism of deformable mirror

Abstract

The invention discloses a middle type water-cooling heat dissipation mechanism of a deformable mirror. The middle type water-cooling heat dissipation mechanism of the deformable mirror comprises a mirror body, a heat sink, an actuating element and two water connectors, wherein a containing groove is formed in the heat sink and used for containing cooling liquid, a water inlet and a water outlet are formed in the heat sink and communicated with the containing groove, and the heat sink is arranged under the mirror body. A plurality of actuating legs are arranged on the actuating element, each actuating leg penetrates through the heat sink to be in contact with the lower surface of the mirror body, and therefore the amount of deformation of the mirror body is controlled through control over the amount of actuating of each actuating leg. The two water collectors are communicated with the water inlet and the water outlet respectively. According to the middle type water-cooling heat dissipation mechanism of the deformable mirror, heat of laser penetrating through the mirror body can be adsorbed by the cooling liquid in the heat sink, heat conduction efficiency is high, so that the phenomenon that working performance of the actuating element is influenced by radiation of the laser penetrating through the mirror body is avoided. Therefore, the amount of deformation of the mirror body will not be influenced by fluctuation of the temperature, and stability of the deformable mirror is improved. In addition, the middle type water-cooling heat dissipation mechanism of the deformable mirror is simple in structure.

Description

technical field [0001] The invention relates to the field of deformable mirrors, in particular to an intermediate water-cooling heat dissipation mechanism for deformable mirrors. Background technique [0002] Deformable mirrors, also known as deformable mirrors, are mainly used in various adaptive optics systems. As a wavefront correction device to correct wavefront errors, they play an extremely important role in adaptive optics systems. One of the important components, the research and development of the deformable mirror is related to the correction ability and correction accuracy of the whole adaptive optics system. [0003] However, the currently used deformable mirror mechanism also has its design limitations. When the laser to be processed irradiates its working surface, the actuating element of the deformable mirror will be irradiated by a small part of the residual laser light and heat up rapidly, so that the base, together with each The fittings swell and even dam...

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Problems solved by technology

[0003] However, the currently used deformable mirror mechanism also has its design limitations. When the laser to be processed irradiates its working surface, the actuating element of the deformable mirror will be irradiated by a small part of the residual laser light and heat up rapidly, so that the base, together with each Fittings swell and even damage the actuating element

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