Quantum efficiency calibration device and calibrating method for CCD (charge coupled device)

Abstract

The invention provides a quantum efficiency calibration device for a CCD (charge coupled device), comprising a light source, a monochromator, an integrating sphere, a monitoring detector, a fiber optic spectrometer, a data acquisition system, a precise displacement platform, a CCD drive circuit and a control system; the output light of the light source and the monochromator is injected to the integrating sphere through four symmetric directions; the fiber optic spectrometer obtains the wavelength of the output light at the output port of the integrating sphere through a light collector; the precise displacement platform adjusts the photosensitive surface of the tested CCD to be positioned in the center of the light outlet hole of the integrating sphere; the data acquisition system collects one frame or multiple frames of the output signal of the tested CCD; the monitoring detector obtains the light power distribution of the integrating sphere at the output port of the integrating sphere; the control system changes the output wavelength of the monochromator according to certain stepping and tests the quantum efficiency of the CCD at the next wavelength point and draws the changing curve of the quantum efficiency of the tested CCD, along with the wavelength.

Description

technical field [0001] The invention relates to the technical field of testing, in particular to a CCD device quantum efficiency calibration device, and also relates to a CCD device quantum efficiency calibration method. Background technique [0002] At present, there is no relevant device for calibrating the quantum efficiency of CCD devices. The existing method mainly uses a single-point light to test the quantum efficiency of the CCD device, and then measures the light-to-spectrum of the CCD device through the relative spectral response test system. The response curve calculates the quantum efficiency of the CCD device in the entire band of the CCD device through the measured single-point quantum efficiency of the CCD device and the relative spectral response of the CCD device. This method generally requires two sets of systems to complete the test of the quantum efficiency of the CCD device, and it is costly, inefficient, and time-consuming. Contents of the invention ...

AI Technical Summary

Problems solved by technology

[0003] The present invention proposes a CCD device quantum efficiency calibration device and calibration method, which solves the problems of high cost, low efficiency, and time-consuming in the prior art that need two sets of systems to complete the test of CCD device quantum efficiency

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