Multi-phase sensor
A sensor and sensor chip technology, applied in the field of sensors, can solve problems such as slow measurement speed, poor selectivity, and low sensitivity, and achieve the effects of long service life, high sensitivity, and high measurement accuracy
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[0015] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific implementation methods and accompanying drawings. Here, the exemplary embodiments of the present invention and their descriptions are used to explain the present invention, but not to limit the present invention.
[0016] The multiphase sensor of the present invention comprises a housing 1 , a base 2 , an A pin 3 , a B pin 4 , a C pin 5 , a D pin 6 , and a sensor chip 11 . The shell 1 is buckled on the base 2 to protect the sensor chip; there are four holes on the base 2 to fix the four pins respectively; A pin 3, B pin 4, C pin The pin 5 and the D pin 6 are respectively connected to the sensor chip 11 through the holes on the base.
[0017] The sensor chip 11 includes a heating substrate layer 7 , an A sensitive layer 8 , a B sensitive layer 9 , and a C sensitive layer 10 . The he...
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