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High-frequency micro-displacement driving apparatus and control method

A driving device and micro-displacement technology, applied in the direction of AC motor control, electromechanical devices, control systems, etc., can solve the problems of response lag, easy creep linearity, etc., and achieve the goal of overcoming response lag, high-precision output, and real-time monitoring Effect

Active Publication Date: 2013-10-16
深圳市华科星电气有限公司
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Problems solved by technology

[0004] In order to overcome the shortcomings of the existing micro-displacement drivers, such as response lag, easy creep and poor linearity, the technical problem to be solved by the present invention is to propose a high-frequency micro-displacement driver, which has high output displacement precision, linearity and high Good frequency characteristics, compact structure, good sealing, high integration, suitable for small volume micro-motion platform

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  • High-frequency micro-displacement driving apparatus and control method
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  • High-frequency micro-displacement driving apparatus and control method

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Embodiment Construction

[0028] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.

[0029] Such as figure 1 Shown is a schematic diagram of the structure of the high-frequency micro-displacement driving device.

[0030] A high-frequency micro-displacement driving device provided in this embodiment includes a casing 1 and a voice coil motor, the casing 1 is a cylindrical structure, the voice coil motor is arranged inside the casing 1, and the The voice coil motor includes a stator and a mover, the mover moves along the axial direction of the stator, and a displacement sensor for detecting axial displacement is arranged between the stator and the mover.

[0031] The stator includes a yoke 21 and a magnet 22 , and the magnet 22 is fixed on the yoke 21 . The mover includes a central shaft 23 , a coil support 24 and a coil 25 , the coil support 24 is fixed on the central shaft 23 , an...

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Abstract

The invention discloses a high-frequency micro-displacement driving apparatus and belongs to the micro-displacement driver field. The driving apparatus comprises a housing and a voice coil motor, wherein the voice coil motor is arranged in the housing and comprises a stator and a rotor, and the rotor moves along an axial direction of the stator. A displacement sensor is arranged between the stator and the rotor, film pressing covers fixedly connected with the housing are mounted on two sides of the housing; the stator comprises magnet yoke and two magnets fixed on the magnet yoke; and the rotor comprises a central shaft, two coil supports fixedly connected with the central shaft, and two coils wound on the coil supports. An installation hole is disposed in a middle part of the film pressing cover. The central shaft penetrates the installation hole and is connected with a position-restricted shaft shoulder in a fastening manner by a stop nut. The apparatus provided by the invention has the advantages of high precision of output displacement, good linearity and high frequency characteristics, compact structure, good sealing performance, high integrated level and applicability of small-size micro-motion platforms.

Description

technical field [0001] The invention relates to the field of micro-displacement drives, in particular to a high-frequency micro-displacement drive device and a control method for the device to realize micro-displacement. Background technique [0002] Micro-displacement drive devices are widely used in technical fields such as optical instruments, microelectronics processing, and high-precision processing. For example, the tool device of the fast tool servo machining center is equipped with a micro-displacement drive device with fast response and high precision. [0003] Piezoelectric ceramic micro-displacement driver is a common micro-displacement drive device. For example, the Chinese Patent Application Publication No. CN10248325A discloses a large-load piezoelectric ceramic micro-displacement driver and its manufacturing method. The large-load piezoelectric ceramic micro-displacement driver includes an elastic diaphragm, an upper plate, a No. 1 piezoelectric component in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02K41/02H02P25/06
Inventor 杨志军白有盾陈新高健陈新度刘冠峰李克天李泽湘杨海东
Owner 深圳市华科星电气有限公司
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