Mutual sensing piezoelectric equal ratio pump

Abstract

The invention provides a mutually-inductive piezoelectric equal-proportion blending pump and belongs to a miniature precise liquid blending device. According to the mutually-inductive piezoelectric equal-proportion blending pump, a left pump cavity shell and a right pump cavity shell are respectively and fixedly connected with a middle pump body through bolts; a piezoelectric vibrator I is tightly pressed between the left pump cavity shell and the pump body through a sealing ring; a piezoelectric vibrator II is tightly pressed between the right pump cavity shell and the pump body through a sealing ring; an inlet umbrella-shaped valve I and an outlet umbrella-shaped valve I are respectively and fixedly connected with the left pump cavity shell; an inlet umbrella-shaped valve II and an outlet umbrella-shaped valve II are respectively and fixedly connected with the right pump cavity shell; a piezoelectric wafer I and a piezoelectric wafer IV, which are close to the pump cavity shells, are respectively connected with two alternating-current driving power sources; a piezoelectric wafer II and a piezoelectric wafer III, which are close to the pump body, are connected with a feedback control circuit. The mutually-inductive piezoelectric equal-proportion blending pump has the advantages that the structure is novel; the pump can be more direct and reliable through comparison of voltage signals generated by self deformation of the piezoelectric wafers, and the blending precision is high; an externally-arranged sensor is not needed so that the microminiaturization is convenient and the cost is saved.

Description

technical field [0001] The invention belongs to a micro-precise liquid mixing device, in particular to a bichip piezoelectric pump for realizing equal proportion mixing of two liquids. Background technique [0002] The piezoelectric pump is a piezoelectric drive device with the advantages of precise output, small size, low energy consumption, no electromagnetic interference, and fast response. It is widely used in the fields of micro-electromechanical, aviation, medical equipment, bioengineering, and chemical machinery. prospect. Piezoelectric pumps developed in recent years for blending, such as Chinese patents 201220200501.0, 201210050805.8, 200820080781.x, mostly blend and mix at the same time, but when the two liquids are coupled with each other, it is difficult to control the blending ratio, and the output flow The volatility is large, and the accuracy of deployment is low. If the accuracy of deployment is to be improved, a flow detection sensor must be added to the pi...

AI Technical Summary

Problems solved by technology

[0004] The invention provides a mutual-sensing piezoelectric equal-proportion matching pump, which is used to solve the problem of low precision of the current matching pump and the need for additional detection sensors. The piezoelectric bimorph is used as the driving and sensing element at the same time, and the piezoelectric The voltage signals generated by the effect are compared with each other, the output flow of the two pump chambers is adjusted, the output accuracy of the piezoelectric matching pump is improved, and a new way is provided for the miniaturization of the piezoelectric matching pump

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